@phdthesis{Ganeva2013, author = {Marina Ganeva}, title = {Formation of metal nano-size clusters with a DC magnetron-based gas aggregation source}, journal = {Erzeugung von Nanometer-gro{\"s}en Metallcluster mit einer auf dem DC-Magnetron-Prinzip-basierenden Gasaggregationsquelle}, url = {https://nbn-resolving.org/urn:nbn:de:gbv:9-001542-6}, year = {2013}, abstract = {Nano-size silver and copper clusters were produced with a DC magnetron-based gas aggregation source. The typical mass of the studied clusters was in the range of 10000 atoms for copper clusters, and in the range of 1000 atoms for silver clusters. The processes of cluster formation, cluster charging and cluster flow were investigated. Technique for measurement of cluster ion velocity distribution functions was developed and applied. Influence of the magnetron target erosion on the mass spectra was systematically investigated and quantitatively characterized. Results of the present work include an experimental and theoretical investigation of the effects, which are of great importance for the production of cluster beams with the desired properties.}, language = {en} }