@phdthesis{Dodt2009,
  author    = {Dirk Dodt},
  title     = {Determination of the Electron Energy Distribution Function of a Low Temperature Plasma from Optical Emission Spectroscopy},
  journal    = {Bestimmung der Elektronenenergieverteilungsfunktion eines Niedertemperaturplasmas mit Hilfe optischer Emissionsspektroskopie},
  url       = {https://nbn-resolving.org/urn:nbn:de:gbv:9-000649-6},
  year      = {2009},
  abstract  = {The experimental determination of the electron energy distribution of a low pressure glow discharge in neon from emission spectroscopic data has been demonstrated. The method extends an approach by Fischer and Dose [5]. The spectral data were obtained with a simple overview spectrometer and analyzed using a strict probabilistic, Bayesian data analysis. It is this Integrated Data Analysis (IDA) approach, which allows the significant extraction of non-thermal properties of the electron energy distribution function (EEDF). The results bear potential as a non-invasive alternative to probe measurements. This allows the investigation of spatially inhomogeneous plasmas (gradient length smaller than typical probe sheath dimensions) and plasmas with reactive constituents. The diagnostic of reactive plasmas is an important practical application, needed e.g. for the monitoring and control of process plasmas. Moreover, the experimental validation of probe theories for magnetized plasmas as a long-standing topic in plasma diagnostics could be addressed by the spectroscopic method.},
  language  = {en}
}