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Strain Effects by Surface Oxidation of Cu3N Thin Films Deposited by DC Magnetron Sputtering

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Metadaten
Author: Abhijit Majumdar, Steffen Drache, Harm Wulff, Arun Mukhopadhyay, Satyaranjan Bhattacharyya, Christiane Helm, Rainer Hippler
URN:urn:nbn:de:gbv:9-opus-27952
DOI:https://doi.org/10.3390/coatings7050064
ISSN:2079-6412 (eISSN)
Parent Title (English):Coatings
Publisher:MDPI
Document Type:Article
Language:English
Date of first Publication:2017/04/29
Release Date:2020/03/06
Tag:copper nitride; crystal structure; magnetron sputtering; thin film deposition
GND Keyword:-
Volume:7
Issue:5
Faculties:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik
Licence (German):License LogoCreative Commons - Namensnennung