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Tunable Diode Laser Absorption Spectroscopy of Dusty Plasmas

  • In this work, the investigation of dusty plasma by means of tunable diode laser spectroscopy was carried out. Special interest was focused on the interactions of dust particles and metastable atoms. At first, Al density and temperature in dc and pulsed magnetron discharges were measured. Measurements with argon as working gas show an expected behavior of the measured atom density and temperature. Decrease of absorption signal was observed in argon/oxygen and argon/methane mixtures. A small admixture of oxygen leads to a complete disappearance of the absorption signal indicating vanishing Al atom density. The effect is believed to be caused by the oxidation of the magnetron target. This decrease reveals typical hysteresis behavior caused by poisoning of the target. Significant difference between critical oxygen flow value in dc and pulsed modes was registered. Then dust formation and plasma behaviors in hydrocarbon containing plasmas were analysed. The dust growing plasmas (Ar/C2H2, Ar/CH4 and Ar/C3H6 rf plasmas) were characterized by laser transmission and scattering methods, ion energy distribution function and mass spectrum evolution by plasma processing monitor, and the spatial distribution in pristine plasma and the temporal behavior of the metastable atom density in processing plasma using TDLAS. Pristine plasma were then characterized in term of metastable density and temperature. The radial distribution of neon metastable atom density in capacitive coupled rf discharge can be approximated to a Gaussian profile with the width smaller than plasma chamber radius. The diffusion flow of metastable atoms deduced from their spatial density distribution gives the loss of metastable atom in the plasma sheath. Argon metastable density was measured in rf plasma and compared with a simple model for metastable density. The model explains well the trend of metastable density with respect to the change of plasma input power. Metastable density of dusty plasma with injected dust particles was measured and compared to that of pristine plasma. The particle heating by metastable atoms was strongly evidenced. The power absorbed by dust particles due to bombardment of metastable atoms onto a dust particle surface in our experiments is about 0.04 Wm-2 for the low dust density case and lower for higher dust density which is in the same order as the contributions of kinetic energy of ions and electrons and the energy released by their recombination on the grain surface. The influence of dust particle density and size on metastable density was studied. Through measuring metastable density, TDLAS can be used as a tool to study the dust growth process in processing plasma.
  • In diese Arbeit, die staubigen Plasmen durch Laserabsorptionsspektroskopie wurde untersucht. Besonderes Interesse konzentrierte sich auf die Wechselwirkungen von Partikeln und metastabilen Atome.

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Metadaten
Author: Hoang Tung Do
URN:urn:nbn:de:gbv:9-000605-2
Title Additional (German):Laserabsorptionsspektroskopie der staubigen Plasmen
Advisor:Prof. Dr. Rainer Hippler
Document Type:Doctoral Thesis
Language:English
Date of Publication (online):2009/04/23
Granting Institution:Ernst-Moritz-Arndt-Universität, Mathematisch-Naturwissenschaftliche Fakultät (bis 31.05.2018)
Date of final exam:2009/04/15
Release Date:2009/04/23
GND Keyword:Dusty plasma, tunable diode laser absorption spectroscopy
Faculties:Mathematisch-Naturwissenschaftliche Fakult√§t / Institut f√ľr Physik
DDC class:500 Naturwissenschaften und Mathematik / 530 Physik