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Examples for application and diagnostics in plasma–powder interaction
- Low-pressure plasmas offer a unique possibility of confinement, control and fine tailoring of particle properties. Hence, dusty plasmas have grown into a vast field and new applications of plasma-processed dust particles are emerging. There is demand for particles with special properties and for particle-seeded composite materials. For example, the stability of luminophore particles could be improved by coating with protective Al2O3 films which are deposited by a PECVD process using a metal-organic precursor gas. Alternatively, the interaction between plasma and injected micro-disperse powder particles can also be used as a diagnostic tool for the study of plasma surface processes. Two examples will be provided: the interaction of micro-sized (SiO2) grains confined in a radiofrequency plasma with an external ion beam as well as the effect of a dc-magnetron discharge on confined particles during deposition have been investigated.
| Author: | H Kersten, R Wiese, G Thieme, M Fröhlich, A Kopitov, D Bojic, F Scholze, H Neumann, M Quaas, H Wulff, R Hippler |
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| URN: | urn:nbn:de:gbv:9-opus-59618 |
| DOI: | https://doi.org/10.1088/1367-2630/5/1/393 |
| ISSN: | 1367-2630 |
| Parent Title (English): | New Journal of Physics |
| Publisher: | IOP Science |
| Place of publication: | Bristol |
| Document Type: | Article |
| Language: | English |
| Date of first Publication: | 2003/07/15 |
| Release Date: | 2022/11/30 |
| GND Keyword: | - |
| Volume: | 5 |
| Issue: | 1 |
| Page Number: | 16 |
| Faculties: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |
| Licence (German): |  Creative Commons - Namensnennung |