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Surface Stoichiometry and Depth Profile of Tix-CuyNz Thin Films Deposited by Magnetron Sputtering
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| Author: | Arun Kumar Mukhopadhyay, Avishek Roy, Gourab Bhattacharjee, Sadhan Chandra Das, Abhijit Majumdar, Harm Wulff, Rainer Hippler |
|---|---|
| URN: | urn:nbn:de:gbv:9-opus-46920 |
| DOI: | https://doi.org/10.3390/ma14123191 |
| ISSN: | 1996-1944 |
| Parent Title (English): | Materials |
| Publisher: | MDPI |
| Document Type: | Article |
| Language: | English |
| Date of first Publication: | 2021/06/09 |
| Release Date: | 2021/07/27 |
| Tag: | N incorporation; Ti-Cu-N coating; Transmission electron microscopy; X-ray diffraction; X-ray photoelectron spectroscopy; magnetron sputtering |
| GND Keyword: | - |
| Volume: | 14 |
| Issue: | 12 |
| Faculties: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |
| Licence (German): |  Creative Commons - Namensnennung |