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Ion formation in an argon and argon-oxygen gas mixture of a magnetron sputtering discharge

  • Formation of singly and doubly charged Arq+ and Tiq+ (q = 1,2) and of molecular Ar 2 +, ArTi+, and Ti 2 + ions in a direct current magnetron sputtering discharge with a Ti cathode and argon as working gas was investigated with the help of energy-resolved mass spectrometry. Measured ion energy distributions consist of low-energy and high-energy components resembling different formation processes. Intensities of Ar 2 + and ArTi+ dimer ions strongly increase with increasing gas pressure. Addition of oxygen gas leads to the formation of positively charged O+, O2 +, and TiO+ and of negatively charged O− and O2 - ions.

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Metadaten
Author: R Hippler, M Cada, V Stranak, Z Hubicka
URN:urn:nbn:de:gbv:9-opus-58926
DOI:https://doi.org/10.1088/2399-6528/ab1e82
ISSN:2399-6528
Parent Title (English):Journal of Physics Communications
Publisher:IOP Publishing
Place of publication:Bristol
Document Type:Article
Language:English
Date of first Publication:2019/05/20
Release Date:2022/11/11
Tag:ion mass spectrometry; magnetron sputtering; molecular ion formation; negative ions
GND Keyword:-
Volume:3
Issue:5
Article Number:055011
Page Number:9
Faculties:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik
Licence (German):License LogoCreative Commons - Namensnennung