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Strain Effects by Surface Oxidation of Cu3N Thin Films Deposited by DC Magnetron Sputtering
| Author: | Abhijit Majumdar, Steffen Drache, Harm Wulff, Arun Mukhopadhyay, Satyaranjan Bhattacharyya, Christiane Helm, Rainer HipplerORCiD |
|---|---|
| URN: | urn:nbn:de:gbv:9-opus-27952 |
| DOI: | https://doi.org/10.3390/coatings7050064 |
| ISSN: | 2079-6412 (eISSN) |
| Parent Title (English): | Coatings |
| Publisher: | MDPI |
| Document Type: | Article |
| Language: | English |
| Date of first Publication: | 2017/04/29 |
| Release Date: | 2020/03/06 |
| Tag: | copper nitride; crystal structure; magnetron sputtering; thin film deposition |
| GND Keyword: | - |
| Volume: | 7 |
| Issue: | 5 |
| Faculties: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |
| Licence (German): |  Creative Commons - Namensnennung |