52.70.-m Plasma diagnostic techniques and instrumentation
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In this Ph.D. project a method is developed to measure the magnetic field and to derive variations in the total plasma pressure due to (dia-) magnetic effects. For this purpose a plasma diagnostic has been set up at the fusion experiment ASDEX Upgrade to measure spectroscopically polarized light. The light is emitted from fast beam-particles excited by the plasma. Since the fast atoms travel through a magnetic field at high velocity, a strong Lorentz field is seen in the moving frame. This electric field gives rise to the so-called motional Stark-effect (MSE) and it is possible to conclude from the Stark-spectrum on the magnetic field.
This thesis is devoted to experiments on three-dimensional dust clouds which are confined in low temperature plasmas. Such ensembles of highly electrically charged micrometer-sized particles reveal fascinating physics, such as self-excited density waves and vortices. At the same time, these systems are challenging for experimental approaches due to their three-dimensional character. In this thesis, new optical diagnostics for dusty plasmas have been developed and, in combination with existing techniques, have been used to study these 3D dusty plasmas on different size and time scales.
Magnetic reconnection is a fundamental plasma process where a change in field line connectivity occurs in a current sheet at the boundary between regions of opposing magnetic fields. In this process, energy stored in the magnetic field is converted into kinetic and thermal energy, which provides a source of plasma heating and energetic particles. Magnetic reconnection plays a key role in many space and laboratory plasma phenomena, e.g. solar flares, Earth’s magnetopause dynamics and instabilities in tokamaks. A new linear device (VINETAII) has been designed for the study of the fundamental physical processes involved in magnetic reconnection. The plasma parameters are such that magnetic reconnection occurs in a collision-dominated regime. A plasma gun creates a localized current sheet, and magnetic reconnection is driven by modulating the plasma current and the magnetic field structure. The plasma current is shown to flow in response to a combination of an externally induced electric field and electrostatic fields in the plasma, and is highly affected by axial sheath boundary conditions. Further, the current is changed by an additional axial magnetic field (guide field), and the current sheet geometry was demonstrated to be set by a combination of magnetic mapping and cross-field plasma diffusion. With increasing distance from the plasma gun, magnetic mapping results in an increase of the current sheet length and a decrease of the width. The control parameter is the ratio of the guide field to the reconnection magnetic field strength. Cross-field plasma diffusion leads to a radial expansion of the current sheet at low guide fields. Plasma currents are also observed in the azimuthal plane and were found to originate from a combination of the field-aligned current component and the diamagnetic current generated by steep in-plane pressure gradients in combination with the guide field. The reconnection rate, defined via the inductive electric field, is shown to be directly linked to the time-derivative of the plasma current. The reconnection rate decreases with increasing ratio of the guide field to the reconnection magnetic field strength, which is attributed to the plasma current dependency on axial boundary conditions and the plasma gun discharge. The above outlined results offer insights into the complex interaction between magnetic fields, electric fields, and the localized current flows during reconnection.
The absolute density of the metastable N2(A,v=0) molecule was extensively studied in nitrogen barrier discharges at 500 mbar. For the detection of the metastables laser-induced fluorescence spectroscopy (LIF) was used, at which for the calibration of the absoute metastables density a comparison with Rayleigh scattering was performed. To get the ratio of the LIF signal to the Rayleigh signal it is shown that the LIF signal is the convolution of the Rayleigh signal with an exponential decay. Besides, the different cross sections are calculated and the ratio of the detection sensitivities at the laser and fluorescence wavelength is determined. As a first step on the way to atmospheric pressure barrier discharges, the laser-induced fluorescence spectroscopy was implemented in low pressure capacitively coupled radio-frequency discharges. The determined metastables density in the capacitively coupled radio-frequency discharge is somewhat below 10^12 cm^(-3) at 40 Pa and somewhat below 10^13 cm^(-3) at 1000 Pa. The axial density profiles show a nearly symmetric shape due to the long lifetime of the metastable state. At a pressure of 500 mbar the two discharge modes of the barrier discharge, the filamentary and the diffuse mode, were analysed. The filamentary mode was mainly investigated in an asymmetric discharge configuration. Typical densities in the detection volume are in the range of 10^13 cm^(-3), resulting in maximal densities of up to 10^15 cm^(-3) in the microdischarge channel. Such large densities are in agreement with the fast decay by the pooling reaction after the maximum of the metastables density in the afterglow of the discharge pulse. The time dependent measurements in the afterglow of single microdischarges offer a delay of the metastables production with respect to the discharge current. This delay indicates that the metastables production takes place mostly by cascades from higher triplet states, which are in turn excited by electron impact. The axial density profiles show a maximum in metastables density in front of the anode in agreement with optical emission spectroscopy, but which cannot be clearly identified because of the asymmetric discharge configuration. The measurements for the diffuse discharge mode were performed in a symmetric discharge configuration. The metastables density is in the range of 10^13 cm^(-3). It increases during the current pulse of the discharge and decays afterwards. The maximum of the metastables density is delayed with respect to the maximum of the discharge current. The depletion of metastables in the early discharge afterglow is dominated by the pooling reaction, afterwards quenching by nitrogen atoms becomes important assuming a nitrogen atom density in the order of 10^14 cm^(-3). As for the filamentary mode, the losses by diffusion are negligible for the measurement positions. The measured axial density profiles show an accumulation of metastables in front of the anode, whereas the density in front of the cathode is below the detection limit. To calculate the metastables current density to the dielectrics after the discharge pulse a simulation is developed including the dominant volume processes for the depletion of metastables and the axial diffusion. Starting point for the simulation is the axial metastables density distribution at the end of the discharge pulse. The calculated metastables current density at the dielectrics is in the range of 10^14 cm^(-2)s^(-1). With the use of recently calculated secondary electron emission coefficients a comparison of the secondary electron emission by metastables with the discharge current is done. It is figured out that the secondary electron emission current is large enough to be important during the discharge ignition. To expand the simulation to the whole voltage cycle, the excitation of metastables is assumed to be proportional to the discharge current and electron density. Using this model, the measured time dependences of the metastables density are well reproduced for the investigated parameter variations. This is not the case for the axial profiles, where a metastables loss process is missed to explain the formation of a density plateau in front of the anode during the discharge pulse. The intended calculation of the metastables current density shows that the delay of the metastables production with respect to the discharge current might be responsible for the ignition of microdischarges at the beginning of the discharge pulse.
In the framework of the current work has been the plasma initiated and surface catalysed species conversion studied in low pressure and atmospheric plasmas. The aim of the work is to improve the understanding of the internal processes in order to increase the energy efficiency as well as the selectivity of the reaction products of future plasma devices. Beside many technical applications of plasmas, air purification shows great potential. Over the last decades, plasma based pollution control has proofed its ability to remove harmful contaminants or annoying odours from an air stream. However, the energy efficiency and the selectivity of the products are a remaining challenge.
Motivated by these issues, a multi stage packed-bed reactor has been used to remove admixed ethylene and toluene from an air stream. It has been found that the maximum toluene destruction has been 60%, whereas ethylene has been nearly completely removed. The specific energy β has been between 120 and 1600 JL-1. Fourier Transform Infrared spectroscopy, FTIR spectroscopy, has been used to identify and quantify the species H2O, CO2, CO, O3, HNO3, HCN, CH2O, CH2O2, N2O and NO2. However, none of these experiments led to the detection of NO.
The embedment of packing material into a plasma volume leads to increased surface effects. In order to study them, the inner side of a tube reactor, made of Pyrex, served as the surface under study and has been exposed to a rf plasma for 1h. The surface effects of the plasma treatment have been investigated indirectly by studying the oxidation of NO into NO2. After the plasma exposure, the reactor has been evacuated and filled with a gas mixture of 1% NO in N2 / Ar. Both species have been measured using quantum cascade laser absorption spectroscopy, QCLAS. It has been found that, using oxygen containing plasmas, the NO concentration decreased whereas the NO2 concentration increased. Therefore, oxygen containing plasmas are able to deposit oxygen on the surface. The filling with NO leads to the oxidation via the Eley-Rideal mechanism. A simplified model calculation supports these assumptions.
For a more comfortable application of the QCLAS, a compact multi channel spectrometer has been developed, TRIPLE Q. It combines the high time resolution with the possibility to measure the concentration of at least three infrared active species simultaneously. Due to the high time resolution, a huge number of spectra have to be analysed. In order to calculate absolute number densities, an algorithm has been developed which automatically treats typical phenomena like pulse jitter, rapid passage effect or variations of the intensity of the laser pulses.
The gas temperature is an important parameter in plasma physics. Using the TRIPLE Q system, the gas temperature has been determined for pulsed dc plasmas. For this case, NO has been used as a probe gas. From the spectra, the temperature has been calculated using the line ratio method. The relative intensity of the absorption structures of NO at 1900.5cm-1 and 1900.08cm-1 depend on the temperature. Therefore, the ratio has been used to calculate the gas temperature with a time resolution in the μs range.
Vibrationally excited nitrogen can be an energy reservoir that plays an important role in plasma chemistry. In N2 / N2O plasmas, vibrationally excited N2 can undergo relaxation via a resonant vibration vibration coupling between vibrationally excited N2 and N2O. Due to such an efficient energy transfer, the method allows one to study the relaxation of vibrationally excited N2. Using this method, molecules, which are not infrared active, can be monitored. This approach has extended the field of scientific and commercial applications of the QCLAS.
Tunable Diode Laser Absorption Spectroscopy in the mid InfraRed spectral range (IR-TDLAS) has been applied to investigate the behaviour of CF, CF2 and C2F4 species produced in pulsed CF4/H2 capacitively coupled radio frequency plasmas (13.56 MHz CCP). This experimental technique was shown to be suitable for temporally resolved measurements of the absolute number density of the target molecules in the studied fluorocarbon discharges. The temporal resolution of about 20…40 ms typically achieved in the standard data acquisition mode (“stream mode”) was sufficient for the real-time measurements of CF2 and C2F4, but not of CF whose kinetics was observed to be much faster. Therefore, a more sophisticated approach (“burst mode”) providing a temporal resolution of 0.94 ms was established and successfully applied to CF density measurements. In order to enable the TDLAS measurements of the target species, preliminary investigations on their spectroscopic data had been carried out. In particular, pure C2F4 has been produced in laboratory by means of vacuum thermal decomposition (pyrolysis) of polytetrafluoroethylene and used as a reference gas. Therefore, an absorption structure consisting of several overlapping C2F4 lines around 1337.11 cm-1 was selected and carefully calibrated, which provided the first absolute measurements of the species by means of the applied experimental technique. The absolute number density traces measured for CF, CF2 and C2F4 in the studied pulsed plasmas were then analysed, in which two differential balance equations were proposed for each of the species to describe their behaviour during both “plasma on” and “plasma off” phases. Analytical solutions of the balance equations were used to fit the experimental data and hence to deduce important information on the kinetics of the studied molecules. In particular, during the “plasma off” phase, the self-recombination of CF2 (CF2 + CF2 (+M) → C2F4 (+M)) was found to be dominant in the kinetics of the radical, but of minor importance for C2F4 production. A rapid consumption of CF observed within 7…25 ms after switching off the plasma was explained mainly by volume reaction with other species (most likely with CF3), whereas diffusion of the radical towards the reactor walls followed by sticking on the surfaces was found to contribute only at relatively low pressures (<10 Pa). Under certain discharge conditions, measured CF density traces exhibited significant overshoots in 50…150 ms after the plasma ignition, which had not been known from literature before. The electron impact fragmentation of C2F4 was shown to be essential for CF production at the beginning of the “plasma on” phase and therefore for formation of the observed CF density overshoots. Finally, the broad band FTIR spectroscopy was applied in order to better characterize the gas phase composition of the studied plasmas. Thus, absorption bands of CF4, C2F4, C2F6, C3F8, CHF3 and HF stable molecules were detected in the FTIR spectra recorded between 400 and 4000 cm-1. The spectra were then successfully deconvolved and the absolute concentration of the detected species was estimated. In particular, the absolute number density of C2F4 obtained from the FTIR measurements was in a good agreement with that achieved by means of the IR-TDLAS technique. The work was supported by the German Research Foundation (DFG) within the framework of the Collaborative Research Centre Transregio 24 “Fundamentals of Complex Plasmas” (SFB/TRR24, project section B5).
Infrared laser absorption spectroscopy (IRLAS) employing both tuneable diode and quantum cascade lasers (TDLs, QCLs) has been applied with both high sensitivity and high time resolution to plasma diagnostics and trace gas measurements.
TDLAS combined with a conventional White type multiple pass cell was used to detect up to 13 constituent molecular species in low pressure Ar/H2/N2/O2 and Ar/CH4/N2/O2 microwave discharges, among them the main products such as H2O, NH3, NO and CO, HCN respectively. The hydroxyl radical has been measured in the mid infrared (MIR) spectral range in-situ in both plasmas yielding number densities of between 1011 ... 1012 cm-3. Strong indications of surface dominated formation of either NH3 or N2O and NO were found in the H2-N2-O2 system. In methane containing plasmas a transition between deposition and etching conditions and generally an incomplete oxidation of the precursor were observed.
The application of QCLs for IRLAS under low pressure conditions employing the most common tuning approaches has been investigated in detail. A new method of analysing absorption features quantitatively when the rapid passage effect is present is proposed. If power saturation is negligible, integrating the undisturbed half of the line profile yields accurate number densities without calibrating the system. By means of a time resolved analysis of individual chirped QCL pulses the main reasons for increased effective laser line widths could be identified. Apart from the well-known frequency down chirp non-linear absorption phenomena and bandwidth limitations of the detection system may significantly degrade the performance and accuracy of inter pulse spectrometers. The minimum analogue bandwidth of the entire system should normally not fall below 250 MHz.
QCLAS using pulsed lasers has been used for highly time resolved measurements in reactive plasmas for the first time enabling a time resolution down to about 100 ns to be achieved. A temperature increase of typically less than 50 K has been established for pulsed DC discharges containing Ar/N2 and traces of NO. The main NO production and depletion reactions have been identified from a comparison of model calculations and time resolved measurements in plasma pulses of up to 100 ms. Considerable NO struction is observed after 5 ... 10 ms due to the impact of N atoms.
Finally, thermoelectrically cooled pulsed and continuous wave (cw) QCLs have been employed for high finesse cavity absorption spectroscopy in the MIR. Cavity ring down spectroscopy (CRDS) has been performed with pulsed QCLs and was found to be limited by the intrinsic frequency chirp of the laser suppressing an efficient intensity build-up inside the cavity. Consequently the accuracy and advantage of an absolute internal absorption calibration is not achievable. A room temperature cw QCL was used in a complementary cavity enhanced absorption spectroscopy (CEAS) configuration which was equipped with different cavities of up to ~ 1.3 m length. This spectrometer yielded path lengths of up to 4 km and a noise equivalent absorption down to 4 x 10-8 cm-1Hz-1/2. The corresponding molecular concentration detection limit (e.g. for CH4, N2O and C2H2 at 1303 cm-1/7.66 μm) was generally below 1 x 1010 cm-3 for 1 s integration times and one order of magnitude less for 30 s integration times. The main limiting factor for achieving even higher sensitivity is the residual mode noise of the cavity. Employing a ~ 0.5 m long cavity the achieved sensitivity was good enough for the selective measurement of trace atmospheric constituents at 2.2 mbar.
(A paperback version is published by Logos under ISBN 978-3-8325-2345-9.)
In dieser Arbeit wurden Experimente an einem DC-Magnetron-Beschichtungsplasma zur (reaktiven) Abscheidung von Ti, TiNx und TiOx-Schichten durchgeführt. Das Ziel war es, durch Korrelation von Messungen des Ionen- und des Energieeinstroms auf das Substrat während des Beschichtungsvorgangs mit Analysen der abgeschiedenen Schichten Aussagen über die Zusammenhänge von Abscheidebedingungen und Schichteigenschaften zu treffen. Von besonderem Interesse waren hierbei die Unterschiede zwischen den beiden Betriebsmodi des eingesetzten Magnetrons (balanced mode und unbalanced mode), da sich über diesen Parameter der Ioneneinstrom auf das Substrat signifikant beeinflussen lässt, sowie der Einfluss hochenergetischer negativ geladener Ionen, die beim Einsatz von Sauerstoff im Gegensatz zu dem von Stickstoff als Reaktivgas auftreten. Die Maxima der mittels energieaufgelöster Massenspektrometrie gemessenen Energieverteilungen aller Ionenspezies liegen im unbalanced mode im Vergleich zum balanced mode bei um etwa 0,2...1 eV höherer Energie. Der im Wesentlichen von den einfach positiv geladenen Argonionen und bei hohem Reaktivgasfluss den molekularen Reaktivgasionen getragene Gesamtioneneinstrom auf das Substrat ist im unbalanced mode deutlich höher als im balanced mode. Der mit Hilfe einer Thermosonde gemessene Energieeinstrom auf das Substrat steigt linear mit der Entladungsleistung an. Im unbalanced mode ist er, bedingt durch den höheren Gesamtioneneinstrom auf das Substrat und die größere mittlere Energie aller Ionenspezies, um mehr als eine Größenordnung höher als im balanced mode. Eine Abhängigkeit des Energieeinstroms vom Reaktivgasfluss wurde nicht beobachtet. Die röntgenreflektometrisch gemessenen Beschichtungsraten steigen über der Entladungsleistung linear an und sind im unbalanced mode trotz geringerer Sputterraten am Target um ca. 10...20 % höher als im balanced mode. Die Begründung hierfür liefert der im unbalanced mode deutlich höhere Energieeinstrom auf das Substrat. Durch diesen erhöhten Energieeintrag in die aufwachsenden Schichten steht im unbalanced mode mehr Energie für Prozesse an der Oberfläche, wie die Oberflächendiffusion, zur Verfügung. Die somit verbesserte laterale Mobilität der Teilchen an der Oberfläche führt dazu, dass diese besser in die wachsende Kristallstruktur eingebaut werden können. Damit ergibt sich letztendlich im unbalanced mode trotz des geringeren Teilcheneinstroms in allen untersuchten Plasmen eine höhere Abscheiderate von Titan auf dem Substrat. Der Energieeinstrom auf das Substrat ist demnach durch seinen signifikanten Einfluss auf die laterale Mobilität der aufwachsenden Teilchen ein bestimmender Parameter für das Schichtwachstum. Die durch die Beimischung von Reaktivgas zum Plasma auftretende Targetnitrierung bzw. –oxidation verursacht ein deutliches Absinken der Sputterraten am Target und damit der Beschichtungsraten über dem Reaktivgasfluss. Messungen der chemischen Zusammensetzungen der Schichten mittels Röntgenphotoelektronenspektroskopie zeigen, dass die Menge des in die Schichten eingebauten Reaktivgases über dessen Konzentration im Beschichtungsplasma zu kontrollieren ist. Im Argon-Stickstoff-Plasma sind die Werte der aus den röntgenreflektometrisch erhaltenen Dichten bei den im unbalanced mode abgeschiedenen Schichten deutlich höher als bei den im balanced mode abgeschiedenen. Untersuchungen mittels Röntgendiffraktometrie zeigen für diese Schichten auch höhere makroskopische Spannungen. Offenbar führt der größere Energieeinstrom hier zu lokalen Temperaturunterschieden, aus denen aufgrund unterschiedlicher Ausdehnungskoeffizienten von Schicht und Substrat beim Abkühlen makroskopische Schichtspannungen resultieren. Insgesamt werden im Argon-Stickstoff-Plasma im unbalanced mode des Magnetrons kompaktere Schichten mit weniger Lücken abgeschieden als unter denselben Bedingungen im balanced mode. Im Argon-Sauerstoff-Plasma wird dieser positive Effekt des höheren Energieeintrags in die aufwachsenden Schichten durch den im unbalanced mode deutlich höheren Beschuss des Substrats mit hochenergetischen negativ geladenen Sauerstoffionen mehr als aufgehoben. Dadurch kommt es in diesem Betriebsmodus des Magnetrons zu einer erhöhten Lückenbildung in den aufwachsenden Schichten, die somit geringere makroskopische Spannungen und geringere mittlere Dichten aufweisen als die im balanced mode abgeschiedenen. Die Summe dieser Ergebnisse zeigt, dass die Eigenschaften der im hier untersuchten DC-Magnetronplasma abgeschiedenen Schichten maßgeblich von der Zusammensetzung des Beschichtungsplasmas und insbesondere von der Art und der Energie der auf das Substrat auftreffenden Ionen abhängen.