530 Physik
Refine
Year of publication
Document Type
- Doctoral Thesis (156)
Has Fulltext
- yes (156)
Is part of the Bibliography
- no (156)
Keywords
- Plasmaphysik (25)
- Plasma (24)
- Plasmadiagnostik (14)
- Stellarator (13)
- Atmosphärendruckplasma (7)
- Komplexes Plasma (7)
- Polyelektrolyt (7)
- Cluster (6)
- Kernfusion (6)
- Massenspektrometrie (6)
Institute
- Institut für Physik (154)
- Institut für Biochemie (1)
- Institut für Pharmazie (1)
This thesis presents the results of experimental investigations of the vertical and lateral properties of polyelectrolyte multilayer films (PEMs) adsorbed on a solid support. PEMs are a new class of organic thin films based on self-assembly layer-by-layer (LbL) processes of oppositely charged polyelectrolytes (charged polymers). The LbL assembly technique allows precise control of film thickness within a few nanometers and makes PEM systems especially interesting for technical applications. Thin films are prepared by alternating exposure of a hydrophilic substrate to solutions of oppositely charged polyelectrolytes. In this work, synthetic polycation poly (allylamine hydrochloride) (PAH) and polyanion poly (styrene sulfonate) (PSS) have been used. Range and amplitude of the electrostatic force during PEM build-up, has been shielded by use of high salt concentration in the deposition solution. As a foundation of any theory, role of non-elecrostatic (secondary) forces is explored. Four complementary methods have been combined to investigate the properties and composition of PEMs. X-ray reflectivity is sensitive to electron density gradients, and therefore provides information about film thickness, average electron density and interfacial roughness between materials of different electron densities (like PEM and air). Neutrons are the unique probe that is sensitive to the internal order of the multilayers (scattering length density variation) due to selective deuteration of the layers (PSS replaced by PSS_d). Therefore neutron reflectivity at V6 beamline, at the research reactor BER II, Helmholtz Centre for Materials and Energy (former Hahn-Meitner-Institute), was used in this work. Ultraviolet-visible (UV-Vis) light induces the characteristic absorption peak of polyelectrolytes and metallic nanoparticles, therefore with UV-Vis absorption spectroscopy is possible to probe the aggregation of metallic nanoparticles embedded into PEM by measuring their absorption spectra (imaginary part of the refraction index). Atomic force microscopy (AFM) allows to observe lateral structures at nano-level and to obtain surface topology of the films. Application of only small forces (pN) is achieved by use of a intermittent contact (tapping) mode in air. Summarizing the main results, the unambiguous parametrization of the investigated system for neutron reflectivity measurements enables to obtain detailed information about internal interfaces. New approach for polyelectrolyte multilayer architectures consisting of thick protonated and deuterated blocks can be used in order to distinguish different zones of the thin film growth which can be described as precursor and core zones. Thus, almost no bound water is found in precursor layers at 0% relative humidity, which suggests that water is mobile and the precursor layer is not in the glassy state like in the central zone of the PEM. Swelling behaviour of the PEMs (reversibility of the swelling) can be understood in terms of equilibrium reactions. Explored influence of temperature and type of salt used during preparation contributes to a better understanding of the formation of PEMs. The dependence of the film thickness on preparation temperature, concentration and the type of salt can be described by the hydrophobic nature of the effect. Experimental observations demonstrate that it is possible to decrease both the range and the amplitude of the electrostatic force by using an ion concentration of at least 0.1 mol/L in the solution. The role of secondary interactions such as hydrophobic attraction of the chains that can overcome electrostatic repulsion and become the major contributing factor for the layer formation and resulting structures is emphasized.
Es wurde ein Versuchsaufbau für die Behandlung von Titanproben mittels der Plasma-Immersions-Ionen-Implantation konzipiert, konstruiert und aufgebaut. Im Unterschied zu üblichen PIII-Anlagen wurde hier eine kapazitiv gekoppelte RF-Entladung als Hintergrundentladung mit zwei koplanaren Elektroden direkt über den zu behandelnden Titanproben benutzt. Auf diese Weise war es möglich unter Verwendung von Kupfer für die Elektroden und den Probenhalter, die Titanproben mit Kupfer zu dotieren und parallel, durch die Wahl geeigneter Prozessgase, zu oxidieren. Zusätzlich waren neben Prozessgaskontrollern auch Flüssigkeitskontroller vorhanden, so dass mit diesem Versuchsaufbau Gase, verdampfte Flüssigkeiten und erodierte Metalle in verschiedensten Kombinationen gleichzeitig als Prozessgas für die PIII zur Verfügung gestellt werden konnte. Wie bei PIII-Prozessen erforderlich, waren die Hochspannungshöhe und -dauer einstellbar. Der Strom wurde so gemessen, dass er die Ionendosis wider gibt und für die Temperaturmessung der Substratoberfläche wurde ein in-situ Pyrometer verwendet. Die relevanten elektrischen Parameter wurden mittels eines Oszilloskops bestimmt. Es stellte sich heraus, dass ein Gesamtionenstrom von bis zu 48mA implantiert werden konnte. Dies entspricht bis zu 3.5 x 1015 Ionen cm-2 s-1 und dementsprechend einem Energiestrom von bis zu 5 J cm-2 s-1. Die daraus resultierenden Temperaturen der Substratoberfläche betrugen bis zu 600 °C. Diese Parameter bewegen sich durchaus im Parameterfeld herkömmlicher Anlagen. Der erste inhaltliche Arbeitsgegenstand dieser Arbeit bestand darin, die Oberfläche der Titanproben unter Verwendung von Sauerstoff als Prozessgas mit einem ausreichend dicken und idealerweise kristallinen Titandioxid zu modifizieren. Auf diese Weise wurde die undefinierte natürliche Oxidschicht durch ein definiertes Oxid ausgetauscht. Röntgen-Diffraktometrie Messungen der modifizierten Proben ergaben neben alpha-Titan auch Rutil als primäre Kristallstruktur in der Oberfläche. Durch Variation der Prozessparameter, speziell des Duty-Cycle und damit des Ionenstroms bzw. der Temperatur der Titanproben, konnte die Konzentration an Rutil direkt gesteuert werden. Der zweite inhaltliche Arbeitsgegenstand bestand in der Modifikation des Prozesses und des Versuchsaufbaus zur Dotierung des Titans mit einem antimikrobiell wirksamen Metall, wobei Kupfer aufgrund seiner biologischen Eigenschaften favorisiert wurde. Um die positiven physikochemischen Eigenschaften der Titandioxidoberfläche bestmöglich zu nutzen, wurde parallel zur Dotierung mit Kupfer eine definierte Titandioxid-Schicht erzeugt. Als Prozessgas wurden dafür sauerstoffhaltige Gase, speziell Sauerstoff und Wasserdampf verwendet. Es zeigte sich, dass mit Sauerstoff aufgrund des hohen atomaren O Anteils CuO und TiO2 erzeugt, während mit Wasserdampf, aufgrund der reduzierenden Wirkung des Wasserstoffs, bis zu 30% metallisches Kupfer in die TiO2 Matrix eingebracht werden konnte. Zusätzlich konnte ein Übergang von alpha-Titan für kleine Ionendosen zu Rutil für Dosen oberhalb von 4 x 1018 Ionen cm-2 und 450 °C festgestellt werden. Weiterhin zeigten die Diffraktogramme Ti3O als Übergangsmodifikation, jedoch keine Kupfer- oder Kupferoxidkristalle. Durch geeignete Prozessparameterwahl ist es daher selbst bei geringen Implantationsspannungen von 10 kV möglich, einen bis zu 200nm dicken Verbund aus kristallinem TiO2 (Rutil) angereichert mit metallischem Kupfer zu erzeugen. Ein zusätzlicher Arbeitsgegenstand bestand in exemplarischen Zelltests mit Staphylococcus aureus (MRSA) und MG-63 Zellen als Vertreter für problematische Krankenhauskeime bzw. als Modellorganismus für Knochenzellen. Parallel zu diesen Versuchen wurde das Kupfer-Release der mit Kupfer dotierten Titanoberfläche bestimmt. Mit höheren Ionendosen während der Ionenimplantation konnten die Proben dahingehend modifiziert werden, dass eine höhere Kupferkonzentration aus dem Verbund ausgelöst wurde. Dieser Verlauf spiegelte sich auch in den Zelltests wieder. Während die Vitalität der MG-63 Zellen mit steigender Dosis abnahm, stieg die antibakterielle Wirkung an. So konnten über 95% der Bakterien getötet werden, wobei die Zellvitalität mit 80% im Vergleich zur Zelle auf dem Deckgläschen immer noch sehr hoch war. Weiterhin wurde eine brauchbare numerische Simulation erstellt, die ein besseres Verständnis der physikalischen Prozesse auf und unter der Oberfläche der zu modifizierenden Proben ermöglichte. Zusätzlich kann, basierend auf dieser Simulation, eine Prozessabstimmung geschehen. In die Simulation gingen die mit der Software TRIM simulierten Tiefenprofile, Sputterraten der einzelnen Oberflächenelemente, Elementanteile der Oberfläche sowie der einfliegenden Ionen und deren Energie mit ein. Dabei zeigte sich, dass die experimentell erhaltenen Tiefenprofile mit diesem Modell bis zu einem gewissen Genauigkeitsgrad qualitativ und quantitativ erklärt werden können.
A central point of this thesis is the investigation of surface structure and surface forces, which are created by single layers of linear polyelectrolytes (PE). In detail, the properties of cationic poly(allylamine)hydrochloride (PAH) and poly-l-lysine (PLL) and anionic sodium poly(styrene sulfonate) (PSS) are determined, which have been physisorbed onto oppositely charged silica surfaces in presence of a predefined salt concentration IAds. For these investigations, a new averaging method for colloidal probe (CP) force profiles is developed, which leads to an ultimate force resolution of 1 pN after the data processing, (signal to noise ratio of > 1000). Furthermore, a new kind of tapping mode imaging is presented (so called colloidal probe tapping mode, CPTM), which uses a CP instead of a sharp tip and hence which allows to resolve lateral inhomogeneously distributed surface forces. The basics to understand such-like obtained tapping mode images are developed. For adsorption from salt-free solution (IAds = 0) the dominance of an electrostatic double layer repulsion is observed, which is commonly attributed to the adsorption of the PE chains into a rather flat and compact layer and which is in full agreement with theoretical predictions and enormous experimental data available in literature. However, even a small addition of salt to the deposition solution (i.e. IAds > 1 mM NaCl) introduces a new contribution to the surface force, which is attributed to PE chains that are non-flatly physisorbed. Using scaling considerations, it is shown for all investigated PE that this non-flat conformation can be described by brush-like chain adsorption (cf. Section 3.3.5); other conformations like mushroom or pancake are excluded (cf. Section 5.3). Interestingly, these non-flatly physisorbed chains combine properties of neutral and PE brushes: (i) The force is very well described by the theory of Alexander and de Gennes (AdG, cf. Section 5.4). By fitting the AdG force law to the data, it is possible to determine the (brush) thickness L of the PE layer and the average distance s between brush-like physisorbed chains. Although the chains are charged the electrostatic contribution to the surface forces is too small to be noticeable (cf. Section 5.4.2). (ii) The thickness L of this PE layer is much larger compared to the compact layer (observed for salt-free adsorption) and is also subject to a pronounced swelling and shrinking if the bulk salt concentration I is decreased or increased, respectively. Surprisingly, all measurements indicate that L follows a scaling law known for salted end-grafted PE brushes, i.e. L ~ N (I s^2)^(-1/3) (with N denoting the degree of polymerization). Furthermore, the osmotic brush phase is never observed in the experiments, but chain stretching up to 1 / 3 of the contour length is regularly achieved. CPTM imaging applied to PSS shows that the brush-like physisorbed chains are not homogenously distributed over the surface, but form brush domains which coexist with flatly physisorbed chains (cf. sections 5.5 and 5.6). This clearly shows that PSS generally physisorbs in two distinct phases, which differ in conformation (flat vs. brush) and the surface force caused (electrostatic vs. steric repulsion). The force profile of the two phase system is in good approximation simply the superposition of a steric and an electrostatic repulsion, whereby their respective contribution to the composed force profile is given by their area fraction. The quantitative analysis reveals that L and s of the brush phase are independent on IAds. This is remarkable, as a change in IAds is known to induce a continuous transition between a stretched (low IAds) and coiled chain conformation (high IAds) in the deposition solution (cf. [Fleer1993, Yashiro2002]). Hence, one can conclude that the conformation in solution does not necessarily correspond to the conformation after adsorption. It is also shown that the area fraction A of the brush domains strongly depends on N and IAds. For example, for constant N the scaling relation A ~ sqrt(IAds) is determined, which is very similar to the common observation that the surface coverage %Gamma of adsorbed PE layers increases also with %Gamma ~ sqrt(IAds) [Schmitt1996, Cosgrove1986, Ahrens2001, Yim2000, Gopinadhan2007, Cornelson2010]. This suggest that brush-like physisorbed PE chains are responsible for the increase in %Gamma. In fact, Section 5.6 shows that the mass of the brush phase is approx. 0.5 mg/m² which is comparable to the increase in %Gamma reported in literature for IAds = 1 M NaCl [Cosgrove1986, Schmitt1996, Ahrens2001]. As a change in IAds does not affect L and s, but solely the brush area fraction A, it is argued in Section 5.6 that an increase in IAds can be understood as a phase transition from the (disordered) flat phase towards the (ordered and extended) brush phase. Here, further theoretical considerations would be desirable.
Impurity ions pose a potentially serious threat to fusion plasma performance by affecting the confinement in various, usually deleterious, ways. Due to the creation of helium ash during fusion reactions and the interaction of the plasma with the wall components, which makes it possible for heavy ions to penetrate into the core plasma, impurities can intrinsically not be avoided. Therefore, it is essential to study their behaviour in the fusion plasma in detail. Within the framework of this thesis, different problems arising in connection with impurities have been investigated. 1. Collisional damping of zonal flows in tokamkas: The effect of impurities on the collisional damping of zonal flows is investigated. Since the Coulomb collision frequency increases with increasing ion charge, heavy, highly charged impurities play an important role in this process. The effect of such impurities on the linear response of the plasma to an external potential perturbation, as caused by zonal flows, is calculated with analytical methods and compared with numerical simulations, resulting in good agreement. 2. Impurity transport driven by microturbulence in tokamaks: Fine scale turbulence driven by microinstabilities is a source of particle and heat transport in a fusion reactor. A semi-analytical model is presented describing the resulting impurity fluxes and the stability boundary of the underlying mode. The results are compared with numerical simulations. Both the impurity flux and the stability boundary are found to depend strongly on the plasma parameters such as the impurity density and the temperature gradient. 3. Pfirsch-Schlüter transport in stellarators: Due to geometry effects, collisional transport plays a much more prominent role in stellarators than in tokamaks. Analytical expressions for the particle and heat fluxes in an impure, collisional plasma are derived from first principles. Contrary to the tokamak case, where collisional transport is exclusively caused directly by friction, in stellarators an additional source of transport exists, namely pressure anisotropy. Since this term is, contrary to the contribution from friction, non-ambipolar, it plays an important role regarding the ambipolar electric field. Furthermore, the behaviour of heavy impurities in the presence of strong radial temperature and density gradients is studied, which lead to a redistribution of the impurities on the flux surfaces. As a consequence, the radial impurity flux is decreased considerably compared with a plasma in which the impurities are evenly distributed on the flux surfaces.
In the present work, a time- and radial-dependent fluid model has been developed to describe the glow-to-arc transition of the positive column in the course of constriction. The self-consistent model comprises the particle balance equations for the relevant species, the balance equation of the mean electron energy and the heavy particle temperature in the plasma, the Poisson equation for the space-charge potential, and a current balance determining the axial electric field. The model adopts the nonlocal moment method, i.e., the system of the balance equations resulting from the moments of the radially dependent Boltzmann equation is solved. The electron transport and rate coefficients are adapted as functions of the mean energy of the electrons, the gas temperature and the ionization degree. The model is applied to a description of the constriction of the dc positive column in argon, for a wide range of pressures and applied currents. Pronounced nonlocal features of the mean electron energy balance are found and their influence on the constricted argon positive column is analyzed. Different assumptions concerning the electron velocity distribution function (EVDF) have been considered in the present model. The assumption of a Maxwellian distribution for the electrons was found to be inappropriate, while the assumption of a Druyvesteyn distribution for the electrons was found to be suitable for describing qualitatively the glow-to-arc transition. However, the standard model using the EVDF obtained from the solution of the steady-state, spatially homogeneous electron Boltzmann equation including electron-electron collisions allows to describe the constriction effect and provides best agreement with experimental data and other available modelling results. The fluid model has also been used to study a medium-pressure pulsed positive column in xenon at conditions of the contracted discharge. The simulation results provide a detailed insight in the physical mechanisms of xenon discharges in pulsed mode. The stepwise ionization of the excited atoms, the conversion of the atomic ions into molecular ions as well as the dissociative recombination of the molecular ions are found to be the most important processes for the pulsed positive column in xenon plasmas at conditions of the contracted discharge. The comparison of the model predictions with experimental results generally shows good agreement. In particular, the model predictions are suitable for qualitative reproduction of the significant increase of low-lying atomic levels densities as well as of the higher and of the relaxed lowest vibrational states of the Xe2* excimers in the afterglow phase of the pulse.
Tunable Diode Laser Absorption Spectroscopy in the mid InfraRed spectral range (IR-TDLAS) has been applied to investigate the behaviour of CF, CF2 and C2F4 species produced in pulsed CF4/H2 capacitively coupled radio frequency plasmas (13.56 MHz CCP). This experimental technique was shown to be suitable for temporally resolved measurements of the absolute number density of the target molecules in the studied fluorocarbon discharges. The temporal resolution of about 20…40 ms typically achieved in the standard data acquisition mode (“stream mode”) was sufficient for the real-time measurements of CF2 and C2F4, but not of CF whose kinetics was observed to be much faster. Therefore, a more sophisticated approach (“burst mode”) providing a temporal resolution of 0.94 ms was established and successfully applied to CF density measurements. In order to enable the TDLAS measurements of the target species, preliminary investigations on their spectroscopic data had been carried out. In particular, pure C2F4 has been produced in laboratory by means of vacuum thermal decomposition (pyrolysis) of polytetrafluoroethylene and used as a reference gas. Therefore, an absorption structure consisting of several overlapping C2F4 lines around 1337.11 cm-1 was selected and carefully calibrated, which provided the first absolute measurements of the species by means of the applied experimental technique. The absolute number density traces measured for CF, CF2 and C2F4 in the studied pulsed plasmas were then analysed, in which two differential balance equations were proposed for each of the species to describe their behaviour during both “plasma on” and “plasma off” phases. Analytical solutions of the balance equations were used to fit the experimental data and hence to deduce important information on the kinetics of the studied molecules. In particular, during the “plasma off” phase, the self-recombination of CF2 (CF2 + CF2 (+M) → C2F4 (+M)) was found to be dominant in the kinetics of the radical, but of minor importance for C2F4 production. A rapid consumption of CF observed within 7…25 ms after switching off the plasma was explained mainly by volume reaction with other species (most likely with CF3), whereas diffusion of the radical towards the reactor walls followed by sticking on the surfaces was found to contribute only at relatively low pressures (<10 Pa). Under certain discharge conditions, measured CF density traces exhibited significant overshoots in 50…150 ms after the plasma ignition, which had not been known from literature before. The electron impact fragmentation of C2F4 was shown to be essential for CF production at the beginning of the “plasma on” phase and therefore for formation of the observed CF density overshoots. Finally, the broad band FTIR spectroscopy was applied in order to better characterize the gas phase composition of the studied plasmas. Thus, absorption bands of CF4, C2F4, C2F6, C3F8, CHF3 and HF stable molecules were detected in the FTIR spectra recorded between 400 and 4000 cm-1. The spectra were then successfully deconvolved and the absolute concentration of the detected species was estimated. In particular, the absolute number density of C2F4 obtained from the FTIR measurements was in a good agreement with that achieved by means of the IR-TDLAS technique. The work was supported by the German Research Foundation (DFG) within the framework of the Collaborative Research Centre Transregio 24 “Fundamentals of Complex Plasmas” (SFB/TRR24, project section B5).
In der vorliegenden Arbeit wurde die Katodenregion einer quecksilberfreien Helium-Xenon Niederdruckentladung im Brennfleckbetrieb experimentell untersucht. Diese Region ist von besonderem Interesse, da sich hier die Elektronenemission, die Erzeugung von Ionen und metastabilen Atomen sowie lebensdauerbegrenzende Prozesse abspielen. Um die Entladung im Brennfleckbetrieb zu realisieren, kam als Katode eine im Rahmen dieser Arbeit entwickelte neuartige planare Geflechtelektrode zum Einsatz. Mit der Methode der ortsaufgelösten Laser-Atom-Absorptionsspektroskopie (LAAS) wurden die absoluten Teilchendichten der zwei untersten angeregten Xe-Atome und die Gastemperatur in der Katodenregion bestimmt. Die Inhomogenität des Spot-Plasmas fand dabei besondere Berücksichtigung. Sowohl die Teilchendichten der zwei untersten angeregten Xe-Atome als auch die Gastemperatur sind unmittelbar vor dem Brennfleck maximal und fallen in axiale und radiale Richtung stark ab. Insbesondere die Gastemperatur beträgt in einem Abstand von 1 mm vor dem Brennfleck circa 650 K und liegt damit deutlich über Raumtemperatur. Des Weiteren ließ sich die Temperatur im Brennfleck auf der Katodenoberfläche mittels optischer Emissionsspektroskopie ermitteln. Dies geschah durch Anpassung des aufgenommenen Spektrums an die Plancksche Strahlungsgleichung. Die Brennflecktemperaturverteilung weißt ein ausgeprägtes Maximum auf, das je nach Entladungsstromstärke maximale Werte zwischen 1414 K bei 40 mA und 1524 K bei 80 mA annimmt. Von diesem Maximum aus wurde ein starker in alle Richtungen nahezu symmetrischer Temperaturabfall festgestellt. Ein technologisch wichtiger Aspekt hinsichtlich der Lebensdauer einer auf Xenon basierenden quecksilberfreien Lampe ist der negative Effekt der Xe-Gasaufzehrung. In dieser Arbeit wird gezeigt, dass die Gasaufzehrung unter Verwendung der planaren Geflechtelektrode im deutlichen Gegensatz zur industriell gefertigten Becherelektrode, wie sie vielfach in Lampen für Lichtwerbung vorkommt, vernachlässigbar klein ist. Dies wird auf die Ausbildung eines heißen Brennflecks und die damit verbundene hohe Katodentemperatur und niedrige Katodenfallspannung zurückgeführt.
This thesis constitutes a computational study of charge and ion drag force on micron-sized dust particles immersed in rf discharges. Knowledge of dust parameters like dust charge, floating potential, shielding and ion drag force is very crucial for explaining complex laboratory dusty plasma phenomena, such as void formation in microgravity experiments and wakefield formation in the sheaths. Existing theoretical models assume standard distribution functions for plasma species and are applicable over a limited range of flow velocities and collisionality. Kinetic simulations are suitable tools for studying dust charging and drag force computation. The main aim of this thesis is to perform three dimensional simulations using a Particle-Particle-Particle-Mesh ($P^3M$) model to understand how the dust parameters vary for different positions of dust in rf discharges and how these parameters on a dust evolve in the presence of neighboring dust particles. At first, rf discharges in argon have been modelled using a three-dimensional PIC-MCC code for the discharge conditions relevant to the dusty plasma experiments. All necessary elastic and inelastic collisions have been considered. The plasma background is found collisional, charge-exchange collisions between ions and neutrals being dominant. Electron and ion distributions are non-Maxwellian. The dominant heating mechanism is Ohmic. Then, simulations have been done to compute the dust parameters for various sizes of dust located at different positions in the rf discharges. Dust charge and floating potential in the presheath are slightly larger than the values in the bulk due to the higher electron flux to the dust particle in the presheath. From presheath to the sheath the charge and floating potential values decrease due to the decrease of the electron current to the dust. A linear dependence of dust potential on dust size has been found, which results in a nonlinear dependence of the dust charge with the dust size when the particle is assumed to be a spherical capacitor. This has been verified by independently counting the charges collected by the dust. %where indeed it has been noted that the dust charge %scales nonlinearly with the dust size. The computed dust parameters are also compared with theoretical models. Simulated dust floating potentials are comparable to values obtained from Allen-Boyd-Reynolds (ABR) and Khrapak models, but much smaller than the values obtained from Orbit Motion Limited (OML) model. The dust potential distribution behaves Debye-H\"{u}ckel-like. The shielding lengths are in between ion and electron Debye lengths. % indicating shielding by both ions and electrons. Further, the orbital drag force is typically larger than the collection drag force. The total drag force for the collisional case is larger than for the collisionless case and it scales nonlinearly with the dust size. The collection drag values and size-scaling agrees with Zobnin's model. The charging and drag force computation is then extended to two and multiple static dust particles in the rf discharge to study the influence of neighboring dust particles on the dust parameters. Initially, the dust parameters on two dust particles are computed for various interparticle separation distances and for dust particles placed at different locations in the rf discharge. It is observed that for dust separations larger than the shielding length the dust parameters for the two dust particles match with the single dust particle values. As the dust separation is equal to or less than the shielding length the ion drag force increases due to the buildup of a parallel drag force component. However, the main dust properties like charge, potential, vertical component of ion drag are not affected considerably. This is attributed to the smaller collection impact parameter values compared to the dust separation. %This is because the %collection impact parameter values in the sheath and the presheath are smaller %than the smallest dust separation and in case of the dust in the bulk, the %collection impact parameter is comparable with the dust separation. Then the dust charges on multiple dust particles located at different positions in the discharge and arranged along the discharge axis are also computed. It is found that the charges of the multiple dust particles in the bulk or presheath do not differ much from the single particle values at that location. But the dust charges of multiple dust particles located in the sheath drastically differ from the single dust parameter values. Due to ion focusing from dust particles in the upper layers, the ion current increases to dust particles in the lower layers resulting in smaller charge values. This is as well the case where dust particles are vertically aligned as in the standard experiments of dusty plasmas. In conclusion, this work used a fully kinetic (PIC and MD or $P^3M$) model to study the physics of dust charging in rf plasmas. Our simulations revealed that the dust parameters vary considerably from the bulk to the sheath. The CX collisions increase flux to the dust thereby affecting the dust parameters and their scaling with dust size. Also, a dust particle affects the charging dynamics of its neighbor only when their separation is within the shielding length. In the plasma sheath, ion focussing can cause great reduction in dust charges.
Infrared laser absorption spectroscopy (IRLAS) employing both tuneable diode and quantum cascade lasers (TDLs, QCLs) has been applied with both high sensitivity and high time resolution to plasma diagnostics and trace gas measurements.
TDLAS combined with a conventional White type multiple pass cell was used to detect up to 13 constituent molecular species in low pressure Ar/H2/N2/O2 and Ar/CH4/N2/O2 microwave discharges, among them the main products such as H2O, NH3, NO and CO, HCN respectively. The hydroxyl radical has been measured in the mid infrared (MIR) spectral range in-situ in both plasmas yielding number densities of between 1011 ... 1012 cm-3. Strong indications of surface dominated formation of either NH3 or N2O and NO were found in the H2-N2-O2 system. In methane containing plasmas a transition between deposition and etching conditions and generally an incomplete oxidation of the precursor were observed.
The application of QCLs for IRLAS under low pressure conditions employing the most common tuning approaches has been investigated in detail. A new method of analysing absorption features quantitatively when the rapid passage effect is present is proposed. If power saturation is negligible, integrating the undisturbed half of the line profile yields accurate number densities without calibrating the system. By means of a time resolved analysis of individual chirped QCL pulses the main reasons for increased effective laser line widths could be identified. Apart from the well-known frequency down chirp non-linear absorption phenomena and bandwidth limitations of the detection system may significantly degrade the performance and accuracy of inter pulse spectrometers. The minimum analogue bandwidth of the entire system should normally not fall below 250 MHz.
QCLAS using pulsed lasers has been used for highly time resolved measurements in reactive plasmas for the first time enabling a time resolution down to about 100 ns to be achieved. A temperature increase of typically less than 50 K has been established for pulsed DC discharges containing Ar/N2 and traces of NO. The main NO production and depletion reactions have been identified from a comparison of model calculations and time resolved measurements in plasma pulses of up to 100 ms. Considerable NO struction is observed after 5 ... 10 ms due to the impact of N atoms.
Finally, thermoelectrically cooled pulsed and continuous wave (cw) QCLs have been employed for high finesse cavity absorption spectroscopy in the MIR. Cavity ring down spectroscopy (CRDS) has been performed with pulsed QCLs and was found to be limited by the intrinsic frequency chirp of the laser suppressing an efficient intensity build-up inside the cavity. Consequently the accuracy and advantage of an absolute internal absorption calibration is not achievable. A room temperature cw QCL was used in a complementary cavity enhanced absorption spectroscopy (CEAS) configuration which was equipped with different cavities of up to ~ 1.3 m length. This spectrometer yielded path lengths of up to 4 km and a noise equivalent absorption down to 4 x 10-8 cm-1Hz-1/2. The corresponding molecular concentration detection limit (e.g. for CH4, N2O and C2H2 at 1303 cm-1/7.66 μm) was generally below 1 x 1010 cm-3 for 1 s integration times and one order of magnitude less for 30 s integration times. The main limiting factor for achieving even higher sensitivity is the residual mode noise of the cavity. Employing a ~ 0.5 m long cavity the achieved sensitivity was good enough for the selective measurement of trace atmospheric constituents at 2.2 mbar.
(A paperback version is published by Logos under ISBN 978-3-8325-2345-9.)
In dieser Arbeit wurden Experimente an einem DC-Magnetron-Beschichtungsplasma zur (reaktiven) Abscheidung von Ti, TiNx und TiOx-Schichten durchgeführt. Das Ziel war es, durch Korrelation von Messungen des Ionen- und des Energieeinstroms auf das Substrat während des Beschichtungsvorgangs mit Analysen der abgeschiedenen Schichten Aussagen über die Zusammenhänge von Abscheidebedingungen und Schichteigenschaften zu treffen. Von besonderem Interesse waren hierbei die Unterschiede zwischen den beiden Betriebsmodi des eingesetzten Magnetrons (balanced mode und unbalanced mode), da sich über diesen Parameter der Ioneneinstrom auf das Substrat signifikant beeinflussen lässt, sowie der Einfluss hochenergetischer negativ geladener Ionen, die beim Einsatz von Sauerstoff im Gegensatz zu dem von Stickstoff als Reaktivgas auftreten. Die Maxima der mittels energieaufgelöster Massenspektrometrie gemessenen Energieverteilungen aller Ionenspezies liegen im unbalanced mode im Vergleich zum balanced mode bei um etwa 0,2...1 eV höherer Energie. Der im Wesentlichen von den einfach positiv geladenen Argonionen und bei hohem Reaktivgasfluss den molekularen Reaktivgasionen getragene Gesamtioneneinstrom auf das Substrat ist im unbalanced mode deutlich höher als im balanced mode. Der mit Hilfe einer Thermosonde gemessene Energieeinstrom auf das Substrat steigt linear mit der Entladungsleistung an. Im unbalanced mode ist er, bedingt durch den höheren Gesamtioneneinstrom auf das Substrat und die größere mittlere Energie aller Ionenspezies, um mehr als eine Größenordnung höher als im balanced mode. Eine Abhängigkeit des Energieeinstroms vom Reaktivgasfluss wurde nicht beobachtet. Die röntgenreflektometrisch gemessenen Beschichtungsraten steigen über der Entladungsleistung linear an und sind im unbalanced mode trotz geringerer Sputterraten am Target um ca. 10...20 % höher als im balanced mode. Die Begründung hierfür liefert der im unbalanced mode deutlich höhere Energieeinstrom auf das Substrat. Durch diesen erhöhten Energieeintrag in die aufwachsenden Schichten steht im unbalanced mode mehr Energie für Prozesse an der Oberfläche, wie die Oberflächendiffusion, zur Verfügung. Die somit verbesserte laterale Mobilität der Teilchen an der Oberfläche führt dazu, dass diese besser in die wachsende Kristallstruktur eingebaut werden können. Damit ergibt sich letztendlich im unbalanced mode trotz des geringeren Teilcheneinstroms in allen untersuchten Plasmen eine höhere Abscheiderate von Titan auf dem Substrat. Der Energieeinstrom auf das Substrat ist demnach durch seinen signifikanten Einfluss auf die laterale Mobilität der aufwachsenden Teilchen ein bestimmender Parameter für das Schichtwachstum. Die durch die Beimischung von Reaktivgas zum Plasma auftretende Targetnitrierung bzw. –oxidation verursacht ein deutliches Absinken der Sputterraten am Target und damit der Beschichtungsraten über dem Reaktivgasfluss. Messungen der chemischen Zusammensetzungen der Schichten mittels Röntgenphotoelektronenspektroskopie zeigen, dass die Menge des in die Schichten eingebauten Reaktivgases über dessen Konzentration im Beschichtungsplasma zu kontrollieren ist. Im Argon-Stickstoff-Plasma sind die Werte der aus den röntgenreflektometrisch erhaltenen Dichten bei den im unbalanced mode abgeschiedenen Schichten deutlich höher als bei den im balanced mode abgeschiedenen. Untersuchungen mittels Röntgendiffraktometrie zeigen für diese Schichten auch höhere makroskopische Spannungen. Offenbar führt der größere Energieeinstrom hier zu lokalen Temperaturunterschieden, aus denen aufgrund unterschiedlicher Ausdehnungskoeffizienten von Schicht und Substrat beim Abkühlen makroskopische Schichtspannungen resultieren. Insgesamt werden im Argon-Stickstoff-Plasma im unbalanced mode des Magnetrons kompaktere Schichten mit weniger Lücken abgeschieden als unter denselben Bedingungen im balanced mode. Im Argon-Sauerstoff-Plasma wird dieser positive Effekt des höheren Energieeintrags in die aufwachsenden Schichten durch den im unbalanced mode deutlich höheren Beschuss des Substrats mit hochenergetischen negativ geladenen Sauerstoffionen mehr als aufgehoben. Dadurch kommt es in diesem Betriebsmodus des Magnetrons zu einer erhöhten Lückenbildung in den aufwachsenden Schichten, die somit geringere makroskopische Spannungen und geringere mittlere Dichten aufweisen als die im balanced mode abgeschiedenen. Die Summe dieser Ergebnisse zeigt, dass die Eigenschaften der im hier untersuchten DC-Magnetronplasma abgeschiedenen Schichten maßgeblich von der Zusammensetzung des Beschichtungsplasmas und insbesondere von der Art und der Energie der auf das Substrat auftreffenden Ionen abhängen.