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In this thesis, a stereoscopic camera system is presented that is designed for the use on parabolic flights for the investigation of dusty plasmas under microgravity conditions. This camera system consists of three synchronously triggered high-speed cameras observing a common volume of approximately (15 × 15 × 15) mm³ size. In this volume, the three-dimensional trajectories of a large number of particles surrounded by a dense dust cloud were reconstructed. For this task an intricate set of reconstruction algorithms has been developed, including a four-frame linking algorithm and a complex combined 2D/3D tracking algorithm for a reliable tracking of 3D particles. Furthermore, these algorithms effectively suppress so-called ghost particles in the evaluation process which are reconstructed from falsely identified 2D particle correspondences. Dusty plasmas under microgravity conditions are of special interest due to their complex structure and the variety of observable dynamic phenomena. Under typical discharge conditions, a central dust-free void is formed, surrounded by a dense particle cloud. Since the void is inherently dust-free, particles shot into the void can be uniquely identified and used to probe plasma properties inside this region. In the dust cloud itself, processes like self-excited dust-density waves can be observed under suitable experimental conditions. Using the presented camera setup and reconstruction algorithms, two parts of a dusty plasma under microgravity on parabolic flights are investigated. Initially, the force field creating and sustaining the central void is deduced and characterized. The combination of ion drag and electric field force is measured and compared to current models of the ion drag, showing a good agreement with these models. While previous investigations on the forces were limited to two-dimensional slices through the void, our measurements represent the first three-dimensional quantitative analysis of a large fraction of the void region. From this analysis the structure of the force field is determined and separated into a radial and a non-radial (or orthogonal) contribution. It is shown that the radial contribution dominates in the central void, while non-radial forces increase in magnitude close to the void edge. The radial domination is also observed in the velocity distribution of the probe particles which is significantly shifted to radially outward directed velocities for particles leaving the void. Assuming a strictly radial force profile in the horizontal mid-plane of the void, the friction coefficient determining the interaction of the probe particles with the neutral gas background is experimentally determined and shown to match the theoretical expectation. Subsequently, particles at the outer surface of the dust cloud are reconstructed. There, the particles are found to oscillate due to dust-density waves propagating through the high-density dust cloud. For the investigation of the correlation between waves and oscillating particles, the instantaneous wave and oscillation properties are determined and the instantaneous phase difference is obtained. Modeling the probe particles as driven, damped harmonic oscillators, these phase differences between waves and particles are interpreted with respect to the resonance frequency of the oscillating particles. Spatial variations of the phase difference are observed that may be attributed to different frequencies of the dust-density waves, or to changes of the resonance frequency induced by changing local plasma parameters. From a few measurements of particles oscillating at their resonance frequency, information about the surrounding plasma or properties of the particles themselves can be deduced. However, a larger number of reconstructed trajectories is necessary in order to interpret the phase differences on a reliable data basis. The presented camera setup in combination with the evaluation algorithms is a flexible system for the investigation of three-dimensional dusty plasmas. Its robust construction allows the operation of the system in challenging environments such as on parabolic flights, where spatial limitations and vibrations produced by the aircraft make special demands on such a diagnostic tool. This versatility makes our stereoscopic camera setup and the reconstruction process a suitable standard diagnostic for the application with dusty plasmas; this system will therefore be used in future research amongst other things for the investigation of boundary layers in extended three-dimensional dust clouds under microgravity.
Asymmetrical capacitively coupled RF discharges in oxygen, argon and hydrogen have been experimentally investigated with the innovative technique of the phase resolved optical emission spectroscopy. This diagnostic tool allows to measure spatio-temporally resolved emission intensities of electronically excited species with a high resolution. The spatial (axial) resolution was better than 1 mm and a temporal resolution of about 1.5 ns has been achieved. Therefore the plasma induced optical emission within the RF cycle (TRF = 73.75 ns) from the RF sheath region with a typical mean sheath thickness of about 5mm has been studied. Spatio-temporally resolved optical emission patterns of the following optical transitions have been measured for a total gas pressure in the range of 20 to 100 Pa and self-bias voltages between -50 and -550 V: Oxygen plasma Emission at 777.4 nm and 844.6 nm (atomic oxygen) Argon plasma Emission at about 751 nm and 841 nm (argon) Hydrogen plasma Emission at 656.3nm (atomic hydrogen, H alpha-line) These transitions are the most prominent ones of the investigated excited species in these plasmas as could be shown from overview spectra of the plasma induced optical emission in the range from 350 to 850 nm. For the first time such extensive PROES measurements in oxygen CCRF plasmas are presented in this work. The additional investigations of argon and hydrogen plasmas serve as a reference and for a direct comparison with results from the literature. The temporal behavior of the emission intensity is influenced by the effective lifetime of the emitting states which is on the order of the nanosecond time scale of the RF cycle. Therefore, it does not represent the real temporal behavior of the excitation. A simple method has been applied to calculate relative excitation rates from the measured emission intensities to distinguish different excitation mechanisms and their correct relative temporal behavior. In a close collaboration within the framework of the Sonderforschungsbereich Transregio 24 'Fundamentals of Complex Plasmas' a newly 1d3v PIC-MCC code for simulations of capacitive RF discharges in oxygen has been developed by Matyash et al. The very close coupling of experiment and modeling allowed a really detailed and microscopic understanding of the processes and dynamics from the sheath to the bulk plasma in CCRF discharges. The spatio-temporally resolved excitation rate profiles show four different excitation structures (I-IV). Excitation processes due to the following mechanisms in CCPs could be identified and characterized: I Electrons expelled from growing sheath II Electrons detached from negative ions (collisions with neutrals) + secondary electrons from the electrode surface (ion bombardment) III Field-reversal effect, reduced mobility of electrons (electron-neutral collisions) IV Heavy-particle collisions These excitation mechanisms are characterized by different temporal and spatial behaviors of the excitation rate within the RF cycle. Additionally it has been shown that the excitation by electron impact in the investigated oxygen plasmas results mainly from dissociative electron impact excitation (O2 + e -> O + O* + e) and not from direct electron impact excitation (O + e -> O* + e). Actinometry measurements show that the results are not really credible. Thus actinometry is not applicable on the investigated oxygen RF plasma. A challenge in interpretation is the observed excitation pattern IV. Pattern IV has to be caused in connection with heavy particle collisions nearby the electrode surface and could be observed in all the three plasmas oxygen, argon and hydrogen. It is located directly in front of the powered electrode and appears during almost the whole RF cycle. The temporal modulation is nearly sinusoidal and weak in comparison to the first three patterns. This is due to the weak RF modulation of the ion flux towards the electrode surface which has been proven by a PIC simulation. It could be shown that the modulation degree of pattern IV depends on the transition time of the corresponding positive ions through the RF sheath which is influenced by the ion mass. In oxygen as well as in argon CCRF plasmas pattern IV is less modulated than in hydrogen CCRF plasmas due to the heavier ions in oxygen and argon. Additionally the modulation degree increases with increasing pressure due to the more confined plasma at higher pressures which is yielding in a stronger modulated ion current towards the powered electrode.
This thesis constitutes a computational study of charge and ion drag force on micron-sized dust particles immersed in rf discharges. Knowledge of dust parameters like dust charge, floating potential, shielding and ion drag force is very crucial for explaining complex laboratory dusty plasma phenomena, such as void formation in microgravity experiments and wakefield formation in the sheaths. Existing theoretical models assume standard distribution functions for plasma species and are applicable over a limited range of flow velocities and collisionality. Kinetic simulations are suitable tools for studying dust charging and drag force computation. The main aim of this thesis is to perform three dimensional simulations using a Particle-Particle-Particle-Mesh ($P^3M$) model to understand how the dust parameters vary for different positions of dust in rf discharges and how these parameters on a dust evolve in the presence of neighboring dust particles. At first, rf discharges in argon have been modelled using a three-dimensional PIC-MCC code for the discharge conditions relevant to the dusty plasma experiments. All necessary elastic and inelastic collisions have been considered. The plasma background is found collisional, charge-exchange collisions between ions and neutrals being dominant. Electron and ion distributions are non-Maxwellian. The dominant heating mechanism is Ohmic. Then, simulations have been done to compute the dust parameters for various sizes of dust located at different positions in the rf discharges. Dust charge and floating potential in the presheath are slightly larger than the values in the bulk due to the higher electron flux to the dust particle in the presheath. From presheath to the sheath the charge and floating potential values decrease due to the decrease of the electron current to the dust. A linear dependence of dust potential on dust size has been found, which results in a nonlinear dependence of the dust charge with the dust size when the particle is assumed to be a spherical capacitor. This has been verified by independently counting the charges collected by the dust. %where indeed it has been noted that the dust charge %scales nonlinearly with the dust size. The computed dust parameters are also compared with theoretical models. Simulated dust floating potentials are comparable to values obtained from Allen-Boyd-Reynolds (ABR) and Khrapak models, but much smaller than the values obtained from Orbit Motion Limited (OML) model. The dust potential distribution behaves Debye-H\"{u}ckel-like. The shielding lengths are in between ion and electron Debye lengths. % indicating shielding by both ions and electrons. Further, the orbital drag force is typically larger than the collection drag force. The total drag force for the collisional case is larger than for the collisionless case and it scales nonlinearly with the dust size. The collection drag values and size-scaling agrees with Zobnin's model. The charging and drag force computation is then extended to two and multiple static dust particles in the rf discharge to study the influence of neighboring dust particles on the dust parameters. Initially, the dust parameters on two dust particles are computed for various interparticle separation distances and for dust particles placed at different locations in the rf discharge. It is observed that for dust separations larger than the shielding length the dust parameters for the two dust particles match with the single dust particle values. As the dust separation is equal to or less than the shielding length the ion drag force increases due to the buildup of a parallel drag force component. However, the main dust properties like charge, potential, vertical component of ion drag are not affected considerably. This is attributed to the smaller collection impact parameter values compared to the dust separation. %This is because the %collection impact parameter values in the sheath and the presheath are smaller %than the smallest dust separation and in case of the dust in the bulk, the %collection impact parameter is comparable with the dust separation. Then the dust charges on multiple dust particles located at different positions in the discharge and arranged along the discharge axis are also computed. It is found that the charges of the multiple dust particles in the bulk or presheath do not differ much from the single particle values at that location. But the dust charges of multiple dust particles located in the sheath drastically differ from the single dust parameter values. Due to ion focusing from dust particles in the upper layers, the ion current increases to dust particles in the lower layers resulting in smaller charge values. This is as well the case where dust particles are vertically aligned as in the standard experiments of dusty plasmas. In conclusion, this work used a fully kinetic (PIC and MD or $P^3M$) model to study the physics of dust charging in rf plasmas. Our simulations revealed that the dust parameters vary considerably from the bulk to the sheath. The CX collisions increase flux to the dust thereby affecting the dust parameters and their scaling with dust size. Also, a dust particle affects the charging dynamics of its neighbor only when their separation is within the shielding length. In the plasma sheath, ion focussing can cause great reduction in dust charges.
Tunable Diode Laser Absorption Spectroscopy in the mid InfraRed spectral range (IR-TDLAS) has been applied to investigate the behaviour of CF, CF2 and C2F4 species produced in pulsed CF4/H2 capacitively coupled radio frequency plasmas (13.56 MHz CCP). This experimental technique was shown to be suitable for temporally resolved measurements of the absolute number density of the target molecules in the studied fluorocarbon discharges. The temporal resolution of about 20…40 ms typically achieved in the standard data acquisition mode (“stream mode”) was sufficient for the real-time measurements of CF2 and C2F4, but not of CF whose kinetics was observed to be much faster. Therefore, a more sophisticated approach (“burst mode”) providing a temporal resolution of 0.94 ms was established and successfully applied to CF density measurements. In order to enable the TDLAS measurements of the target species, preliminary investigations on their spectroscopic data had been carried out. In particular, pure C2F4 has been produced in laboratory by means of vacuum thermal decomposition (pyrolysis) of polytetrafluoroethylene and used as a reference gas. Therefore, an absorption structure consisting of several overlapping C2F4 lines around 1337.11 cm-1 was selected and carefully calibrated, which provided the first absolute measurements of the species by means of the applied experimental technique. The absolute number density traces measured for CF, CF2 and C2F4 in the studied pulsed plasmas were then analysed, in which two differential balance equations were proposed for each of the species to describe their behaviour during both “plasma on” and “plasma off” phases. Analytical solutions of the balance equations were used to fit the experimental data and hence to deduce important information on the kinetics of the studied molecules. In particular, during the “plasma off” phase, the self-recombination of CF2 (CF2 + CF2 (+M) → C2F4 (+M)) was found to be dominant in the kinetics of the radical, but of minor importance for C2F4 production. A rapid consumption of CF observed within 7…25 ms after switching off the plasma was explained mainly by volume reaction with other species (most likely with CF3), whereas diffusion of the radical towards the reactor walls followed by sticking on the surfaces was found to contribute only at relatively low pressures (<10 Pa). Under certain discharge conditions, measured CF density traces exhibited significant overshoots in 50…150 ms after the plasma ignition, which had not been known from literature before. The electron impact fragmentation of C2F4 was shown to be essential for CF production at the beginning of the “plasma on” phase and therefore for formation of the observed CF density overshoots. Finally, the broad band FTIR spectroscopy was applied in order to better characterize the gas phase composition of the studied plasmas. Thus, absorption bands of CF4, C2F4, C2F6, C3F8, CHF3 and HF stable molecules were detected in the FTIR spectra recorded between 400 and 4000 cm-1. The spectra were then successfully deconvolved and the absolute concentration of the detected species was estimated. In particular, the absolute number density of C2F4 obtained from the FTIR measurements was in a good agreement with that achieved by means of the IR-TDLAS technique. The work was supported by the German Research Foundation (DFG) within the framework of the Collaborative Research Centre Transregio 24 “Fundamentals of Complex Plasmas” (SFB/TRR24, project section B5).