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Ein System zu Abscheidung intermetallischer Cu-Ti basierter Schichten durch Magnetronsputtern wurde entworfen, aufgebaut und plasmadiagnostisch charakterisiert. Die duale, extern schaltbare Leistungselektronik mit hoher Parallelkapazität erlaubt den Pulsbetrieb beider Magnetrons gegeneinander mit beliebiger Frequenz f, Tastgrad t_a/T und Pulsverzögerung t_d. Auf diese Weise kann neben konventionellen Pulsmodi (dual-MS: f = 4.6 kHz, t_a/T = 50 %) das Hochenergieimpulsmagnetronsputtern (dual-HiPIMS: f = 100 Hz, t_a/T = 1 %) realisiert werden. Außerdem können die unterschiedlichen Sputterausbeuten von Ti und Cu durch individuell einstellbare mittlere Entladungsströme kompensiert werden. Die Entladungscharakteristika zeigen besonders hohe temporäre Ströme (I > 50 A) während HiPIMS. Langmuir-Sondenmessungen bestätigen höhere Elektronendichten (n_e = 10^18 m^-3) und eine breitere Elektronenenergieverteilung im Vergleich zu dual-MS. Als Folge kommt es zur verstärkten Ionisierung und Anregung von Plasmaspezies, nachgewiesen durch optische Emissionsspektroskopie (OES). Spektral integrierte OES wurde zur Beschreibung der räumlich und zeitlichen Entladungsentwicklung herangezogen, während mittels Gegenfeldanalysator die für die Schichtbildung wichtige Ionengeschwindigkeitsverteilung zeitaufgelöst erfasst wurde. Die gewonnenen Schichten wurden röntgenographisch analysiert und deren Eigenschaften in Hinblick auf ihre Bildung unter verschiedenen Entladungsmodi gedeutet. Schichtdicke, Kristallinität und Dichte zeigen eine klare Abhängigkeit vom Entladungsmodus mit vorwiegend höherer Güte durch HiPIMS. Die Variation des mittleren Cu-Entladungsstromes erlaubt Einfluss auf die Schichtzusammensetzung, maßgeblich für praktische Anwendungen. Des Weiteren wurden Kompositschichten auf Basis von Cu-Nanopartikeln (Cluster) eingebettet in einem dielektrischen Matrixmaterial (TiO2) synthetisiert und untersucht. Zunächst wurde das Cu-Clusterwachstum durch ein neues Buffergas-Pulsverfahren zeitaufgelöst untersucht und die damit einhergehende Performance der Partikelquelle auf Basis eines einfachen Modells evaluiert. Als Resultat kann die Größen-/Massenverteilung und damit die Eigenschaften der Cluster auf einfache Weise beeinflusst werden. Schließlich wurden die Cu-TiO2-Kompositschichten in einem eigens angefertigten Co-Depositionssystem erstellt. Dabei werden die aus der Gasaggregationsquelle emittierten Cu-Cluster simultan zu reaktiv (mit O2) gesputtertem Ti abgeschieden. Separat abgeschiedene Cu-Cluster zeigen vorwiegend polykristallines fcc-Cu, dass an Luft oder unter Zugabe von molekularem O2 oberflächlich Cu2O ausbildet. Während auch das separat reaktiv abgeschiedene Ti Titandioxid (TiO2) bildet, weist das Cu im Nanokomposit grundlegende strukturelle Unterschiede auf: Im Komposit liegt kein metallisches Cu mehr vor, stattdessen ist es vollständig zu CuO konvertiert. Dies ist auf die Anwesenheit eines reaktiven Sauerstoffplasmas beim Co-Depositionsprozess zurückzuführen. Es konnte gezeigt werden, dass molekularer O2 lediglich eine diffusionsbegrenzte Menge Cu2O erzeugt, während entladungsaktivierte Sauerstoffspezies zur völligen Durchoxidation der Cu-Cluster zu CuO führt. Dies ist eine wichtige Erkenntnis für die zukünftige Herstellung ähnlicher Komposite.
Polyelektrolyt-Multischichten werden durch die sequentielle Adsorption von entgegengesetzt geladenen Polyelektrolyten auf einem festen Substrat hergestellt. Die Präparation layer-by-layer ermöglicht die Beschichtungen von Flächen im cm-Bereich mit Schichtdicken im µm-Bereich sowie einer Kontrolle der Molekülanordnung senkrecht zur Substratoberfläche im nm-Bereich. Aus diesen Eigenschaften ergeben sich zahlreiche Anwendungsmöglichkeiten. Ein Schwerpunkt dieser Arbeit ist die Analyse der Polyelektrolyt-Adsorption bei der Präparation von Multischichten bestehend aus dem Polykation Polyallylaminhydrochlorid (PAH) und dem Polyanion Polystyrolsulfonat (PSS) bzw. Polydiallyldimethylammonium (PDADMA) und PSS. Die Untersuchung der Multischichten unter in-situ Bedingungen erfolgt mittels Ellipsometrie. Zu diesem Zweck wird ein Formalismus der ellipsometrischen Datenauswertung entwickelt, um die Messgenauigkeit bei der Untersuchung dünner, transparenter Schichten zu optimieren. Im Fall von PDADMA/PSS-Multischichten verläuft das Schichtwachstum nicht-linear mit der Anzahl an adsorbierten Doppelschichten. Der nicht-lineare Verlauf wird mit der unterschiedlichen Linienladungsdichte zwischen einer PDADMA- und einer PSS-Kette in Verbindung gebracht. Die quantitative Analyse der ellipsometrischen in-situ-Messungen ergibt, dass alle untersuchten PDADMA/PSS-Multischichten (präpariert aus 0,1 mol/L NaCl-Lösung bei Raumtemperatur) mindestens zwei verschiedene Wachstumsregimes aufweisen: Erst wächst die Schichtdicke parabolisch mit der Anzahl an deponierten Polyanion/Polykation-Schichtpaaren, nach Nlin Schichtpaaren erfolgt ein Übergang in lineares Schichtwachstum, charakterisiert durch eine konstante Dicke pro Schichtpaar dBL. Das parabolische Wachstumsregime lässt sich mit einer Asymmetrie im Adsorptionsverhalten von PDADMA und PSS erklären: Während die adsorbierenden PSS-Moleküle die Oberflächenladung lediglich neutralisieren, führt ein PDADMA-Beschichtungsschritt zu einer Ladungsüberkompensation und hinterlässt eine effektiv positiv geladene Oberfläche. Die deponierte Stoffmenge nimmt mit jeder PDADMA/PSS-Doppelschicht zu, bis nach Nlin Doppelschichten die adsorbierenden PSS-Ketten nicht mehr imstande sind alle positiven Oberflächenladungen zu neutralisieren. Die beiden Wachstumsparameter Nlin und dBL hängen in einem linearen Zusammenhang voneinander ab, da beide einem gemeinsamen Mechanismus folgen: Je mehr Doppelschichten ein parabolisches Wachstumsverhalten zeigen (Nlin), desto höher ist die Oberflächenbelegungsdichte am Ende des parabolischen Wachstumsregimes und desto größer die Doppelschichtdicke dBL. Das Adsorptionsverhalten von PDADMA- und PSS-Ketten wird analysiert, indem das Molekulargewicht Mw beider Polyelektrolyte systematisch variiert wird (zwischen Mw(PDADMA) = 24 kDa ... 322 kDa sowie Mw(PSS) = 8,6 kDa ... 168 kDa). Die Flächenbelegungsdichte pro Doppelschicht wächst proportional zu Mw(PDADMA) an, bis ab dem Schwellwert Mw(PDADMA) = 80 kDa eine Sättigung eintritt und das Schichtwachstum unabhängig vom Wert des PDADMA-Molekulargewichts wird (Nlin = 15 Doppelschichten und dBL = (12,3 ± 1,3) nm). Die Daten legen nahe, dass unterhalb des PDADMA-Schwellwerts lediglich ein Teil einer PDADMA-Kette auf der PSS-terminierten Multischicht adsorbiert und der restliche Teil der adsorbierten Kette in Lösung ragt. Oberhalb des PDADMA-Schwellwertes adsorbiert mindestens noch ein zweiter Abschnitt der Kette und es ragt mindestens ein loop in Lösung. Dies führt zu einer konstanten Gleichgewichtsdicke der Monoschicht unabhängig vom Molekulargewicht. Unterschreitet das PSS-Molekulargewicht den Schwellwert Mw(PSS) = 25 kDa, so beobachtet man den gegenteiligen Effekt: beide Wachstumsparameter Nlin und dBL nehmen deutlich zu. Die größten gemessene Werte (unter Verwendung von 8,6 kDa PSS) lauten Nlin = 33 und dBL = 28,7 nm. Neutronenreflektionsmessungen zeigen, dass dieser Effekt mit der Diffusion der kurzen PSS-Ketten innerhalb der Multischicht einhergeht. Die Ausdehnung der Diffusionszone von 8,6 kDa PSS beträgt 80 nm und nimmt bis zum Erreichen des PSS-Schwellwertes monoton mit Mw(PSS) ab. Im Gegensatz dazu bilden PSS-Ketten mit einem Molekulargewicht oberhalb des Schwellwertes klar lokalisierte, lateral homogene Schichten (mit einer Grenzflächenunschärfe von 2 ... 4,6 nm). Entgegen der intuitiven Erwartung hat eine höhere Adsorptionszeit keinen Einfluss auf die Diffusionszone. Der limitierende Faktor ist die Diffusionszone selbst. In Übereinstimmung mit der theoretischen Erwartung führt die Diffusion von kurzen PSS-Ketten während der Multischicht-Präparation zu einem exponentiellen Wachstum der PDADMA/PSS-Multischichten, sobald Mw(PSS) < 25 kDa. In diesem Fall durchläuft das Schichtwachstum nacheinander erst ein exponentielles, dann ein parabolisches und schließlich ein lineares Regime.
In this thesis, the first on-line mass measurements of the isotopes 52,53K have been performed. These measurements by multi-reflection time-of-flight mass spectrometry with the ISOLTRAP setup at ISOLDE/CERN are linked to previously measured masses of exotic Ca isotopes, which had shown an unexpected large neutron-shell gap at the neutron number N = 32 for the magic proton core Z = 20. The new measurements provide the first exploration of the N = 32 neutron-shell closure below the proton number Z = 20. With a measured empirical two-neutron shell gap of about 3MeV for 51K, the N = 32 gap is smaller as compared to that of 52Ca, which measures about 4MeV, but is still significantly present. This confirms that the nuclear shell effect measured for calcium isotopes is not a phenomenon purely raised by its closed-proton-shell configuration, but is also present in potassium isotopes that possess an open proton shell and an unpaired proton. The second main objective of this thesis was the development of new techniques for efficient mass separation in Penning traps and multi-reflection devices, because the success of nuclear mass measurements with high precision depends crucially on the purity of the ion ensemble. The two main difficulties that have been addressed are, first, when the masses of the ions of interest and the masses of contaminant ions are very similar, and second, when the contaminant ions are predominantly present in the beam from ISOLDE. For the removal of contaminant ions in a high-vacuum Penning trap with high resolving power, a new technique for mass separation has been developed. A simultaneous application of a dipolar radio-frequency field at the magnetron frequency of all ions (mass independent at leading order) and a quadrupolar radio-frequency field at the cyclotron frequency (highly mass dependent) of a chosen ion species provides a new way of ion purification. The result is that the magnetron radius of all ions is increased by the effect of the dipolar excitation, and, at the same time, the quadrupolar excitation leads to a conversion of the radial eigenmotions for the chosen species. The consequence of this simultaneous process is that the wanted ions move back to the trap axes while all other ions are radially ejected from the trap. The advantage of the new method is the simultaneous ejection of all unwanted species in a high vacuum, which otherwise have to be addressed by a dipolar excitation at different frequencies, or by use of complex waveforms if a broadband ejection is required. A comparable (general) broadband ejection as achieved by the new method was previously only achieved in buffer-gas filled Penning traps. Further technical developments were performed with ISOLTRAP’s multi-reflection time-of-flight mass separator. The goal was to improve on situations when dealing with highly contaminated beams from ISOLDE during on-line Penning-trap measurements. In such cases, the number of events obtained in a limited time can be very low for the reason that only a limited number of ions, which predominantly consist of contaminant ions, can be stored and separated in the multi-reflection device at a given time to avoid non-negligible Coulomb interactions between the ions. The situation at ISOLTRAP has been significantly improved by a more efficient use of the separation cycle of the multi-reflection device. The mass-separation cycle is by far shorter (on the order of 10 ms) than a Penning-trap mass measurement (on the order of seconds). Thus, the separation in the multi-reflection device has been decoupled from the Penning-trap mass measurement and is repeated rapidly, while the purified ions are accumulated, stored, and cooled in the preparation Penning trap of ISOLTRAP. The collected ions of interest can then be transferred to the precision-measurement trap. This method increases the possible ratio of the number of contaminant ions to ions of interest by up to two orders of magnitude, i.e. the ratio of the corresponding process durations. Additionally, space-charge problems in multi-reflection devices have been investigated by setting up an off-line apparatus at Greifswald. The dynamical effects of ions in multi-reflection devices under non-negligible Coulomb interactions have been investigated in order to search for possibilities for improvements on such situations. This resulted in a new method of manipulating the ion densities in the device. The ions move in a cloud with large spatial extend for the major part of the trapping time and can later be compressed to small bunches for high-resolution mass separation. Proof-of-principle measurement have been performed with a low number of stored ions, where successful isobar separation has been demonstrated.
The main issue of this thesis was the investigation of dusty plasmas in magnetic fields. We made use of spherical paramagnetic as well as non-magnetic plastic particles in the micrometer range, so-called dust particles. The particles were then trapped in the sheath region of the driven lower electrode of an rf discharge. The plasma chamber was surrounded by coils to apply a horizontal magnetic field with field strengths of up to B=50mT at the particles’ position. In this configuration the sheath electric field and the external magnetic field were perpendicular to each other. Only the electrons could be magnetized but this leads to several forces acting on the dust particles. In some aspects the dust clusters with the magnetic particles show a behavior that is in complete contrast to those consisting of the standard non-magnetic plastic particles. Both types of particles have in common that the dust clusters were found to move either towards the positive or negative ExB-direction as a reaction to the magnetic field. Whether the positive or negative direction was preferred depended on the experimental conditions. The forces that lead to this transport are plasma-based forces induced by the magnetic field. These investigations were performed on two-dimensional horizontal particle systems. Vertically aligned dust particles due to the ion focus interaction have also been studied to determine the influence of horizontal magnetic fields on the stability of such dust pairs. Under certain conditions the vertical alignment can be broken up by the magnetic field. Some additional experiments on the interaction of non-magnetic dust particles in a plasma with UV irradiation were performed, but a significant decrease of dust charge due to a photoelectric effect was not detected. In summary, even relatively weak horizontal magnetic fields have a strong influence on dust particle systems.
In the last decade a new domain has developed in plasma physics: plasma medicine. Despite the successes that have already been achieved in this exciting new field, the interaction of plasmas with “biological materials” is not yet fully understood. Further investigations in particular with respect to the properties of the applied plasmas sources are therefore essential in order to decode this complex interaction process. Currently, a great variety of different discharge types are used in plasma medical investigation which are generally are operated in noble gases like helium and argon or with dry air. In the present work, the main focuses is on the diagnostics of reactive oxygen and nitrogen species (RONS) resulting from the plasma chemistry of an argon radio-frequency (RF) atmospheric pressure plasma jet (APPJ) and its interaction with the ambient atmosphere. To conduct this study, a commercially available plasma device, so-called kinpen is used due to its technical development maturity and its accessibility on the market. As a method of choice, diagnostic techniques are based on optical spectroscopy known to be a reliable tool to investigate plasmas. Consequently, three complementary optical laser diagnostics, namely quantum cascade laser absorption spectroscopy (QCLAS), laser induced fluorescence (LIF) and planar single shot LIF (PLIF), have been successfully applied to the plasma jet itself or its effluent. All of these diagnostics offer a high species selectivity and an excellent spatial and temporal resolution. They are used in this work for i) the characterization of the plasma chemical dynamics with respect to the generation of biological active RONS – in particular for the case of N2 and O2 admixtures. ii) the measurement of the NO density profile in the plasma effluent iii) the investigation of the flow characteristics of the neutral gas component (laminar vs. turbulent) and its influence on the plasma chemistry. Numerical analysis have been carried out in collaboration with PLASMANT (University of Antwerp) via kinetic simulations of the entire plasma chemistry. Expectingly, atomic oxygen (O) and nitric oxide (NO) turn out to be precursors of ozone (O3) and nitric dioxide (NO2). However, it was intriguing to unveil that atomic oxygen and nitrogen metastable (N2(A)) play together a key part --as intermediate species-- in the generation of more stable RONS, e.g. NO. The absolute density of NO space resolved was measured by LIF and absolutely calibrated molecular beam mass spectrometer. LIF was used to determine relative density of OH radical in the plasma plume. 2D-LIF was used to investigate the gas flow pattern with OH as a flow tracer. The results are discussed in details and show different operating mode of the jet, e.g. laminar or turbulent and that the plasma influences these regimes. The first detection and relative measurement by LIF of nitrogen metastable (N2(A)) produced by an argon APPJ is also shortly reported in this work. The outcome of this thesis will bring new insights in the field of argon APPJs chemistry and its interaction with the ambient atmosphere which can be valuable to support plasma modelling and to consider for the applications in plasma medicine.
With the growing importance of advanced lighting technologies, customers expect additional functionality and higher comfort from fluorescent lamps. However, the ability to regulate light intensity (dimmed operation), in particular, exerts enormous stress on fluorescent lamps’ electrodes, leading to increased electrode erosion and significantly reduced lifetimes. During the operation of a fluorescent lamp, free barium (the main compound of the electrode emitter) is produced at the electrode responsible for lowering the work function in order to enable energy-efficient and durable electrodes with lifetimes of up to 20,000 hours. Despite their relatively long lifetimes, electrodes remain the lifetime-limiting factor of a fluorescent lamp. Therefore, for practical applications (e.g., maintaining quality control, adjusting operational parameters, and evaluating new electrode designs), electrode erosion is of special interest. The actual erosion-measurement methods determine a time-averaged erosion level over several hundred operation hours. Thus, a quasi-instantaneous measuring method (short measurement) is still necessary to determine erosion during operation. Such a method would allow us to compare erosion under different discharge conditions (currents, frequencies, or heating currents) from the same electrode in the same lamp. This work focuses on the determination of absolute electrode erosion during the stationary operation of commonly used fluorescent lamps. Commercial T8 lamps (fluorescent lamps with a diameter of 8/8 inch) are investigated at the operating mode of commonly used electronic ballasts with frequencies of several kHz. Operations under standard and dimmed conditions with an additional heating current to reduce electrode erosion are investigated. Electrode erosion is characterized by the erosion of barium, the main compound of the electrode. Therefore, laser-induced fluorescence (LIF), which is the most sensitive method for this application, is applied to determine the absolute densities of the eroded barium in the electrode region. These densities are affected by the plasma in the electrode region and do not directly represent the absolute barium erosion. To overcome this limitation, a new method based on a special measurement technique in combination with a barium-diffusion-model is developed to determine the absolute barium erosion based on the measured densities. It has been found that the barium densities in the electrode region are lower than the equilibrium pressures produced by the reduction of the barium oxide. This could be caused either by a reduced reaction rate, the reduced diffusion of the reactant (primarily barium oxide) or by reduced barium transport through the porous emitter. However, these results suggest that barium erosion depends on temperature and emitter structure, which vary over an electrode’s lifetime. For currents significantly higher than the nominal lamp current, a drastic increase in emitter evaporation is found. Such, an increase in the lamp current from 300 mA to 500 mA leads to an increase in emitter evaporation by a factor of five. Using the lamp for a long period of time under these conditions therefore reduces the lifetime by a factor of five. Notably, at this dramatically increased erosion level, the hot spot temperature only increases from 1120 K to 1170 K. Investigation of various frequencies from 50 Hz to 5 kHz revealed no significant dependence of emitter evaporation on frequency.
The aim of this thesis is to concentrate on the investigation of these ROS&RNS composition distribution and their production pathways in the gas phase produced by a plasma jet. By understanding the physical mechanisms behind the generation of the ROS&RNS a precise tuning and design of the composition distribution in the gas phase can be achieved. One crucial physical parameter is the dissipated power inside the plasma. Only if this parameter is known a meaningful comparison of different feed gas settings is possible. Therefore, a concept for measuring the dissipated power inside the plasma for the modified micro-scaled atmospheric pressure plasma jet( µAPPJ) is designed. Additionally, due to achievements within this thesis it is now possible to ignite a homogeneous discharge in argon and helium within the geometry of the µAPPJ. The used feed gas is a determining factor concerning the electron energy distribution function and consequently influencing the production mechanism of the ROS&RNS. First of all, the electrical characterisation of the modified µAPPJ was performed including the alpha-to-gamma transition. It is shown that the alpha-to-gamma transition power is increasing with increasing frequency. For the first time it is now feasible to investigate the influence of the dissipated power on the neutral gas temperature, the metastable atom densities and the ROS&RNS production for the modified µAPPJ with argon and helium as feed gas. Due to the possibility of changing the feed gas and controlling the dissipated power a fundamental insight into the production mechanism of the ROS&RNS generated by the plasma jet is achieved. With rising dissipated power the temperature and the metastable densities as well as the ozone and nitrogen dioxide concentrations are increasing. By adding molecular oxygen and nitrogen to the feed gas of a plasma jet the ROS&RNS composition can be tuned. However, also the dissipated power is changed by the small amount of admixtures. Due to the developed dissipated power measurements within this thesis it was possible to disentangle the influence of the admixture on the power and on the ROS&RNS production. If the dissipated power is fixed for the µAPPJ with argon and helium feed gas, respectively, the highest amount of ozone was measured with oxygen admixture in an argon discharge, the highest amount of dinitrogen pentoxide with nitrogen admixture in an argon discharge and the highest amount of nitrogen dioxide with nitrogen admixture in a helium discharge. Beyond the influence of the dissipated power and the molecular admixture on the ROS&RNS production the feed gas temperature is a crucial parameter for the corresponding chemical reactions. By changing this parameter the distribution of ozone and nitrogen dioxide can be tuned precisely in such a way that with increasing temperature the ozone density goes down and the nitrogen dioxide density rises. Another determinant for the ROS&RNS composition produced by an atmospheric pressure plasma jet is the influence of ambient air. If the ambient air is changing from pure nitrogen to pure oxygen atmosphere the ozone density produced by the plasma jet is increasing. For the same conditions the nitrogen dioxide has a maximum at an oxygen-to-nitrogen ratio of 1:1. To avoid the influence of the ambient air on the reactive species production the afterglow of the µAPPJ was prolonged with a glass tube. By increasing the amount of molecular admixtures to the feed gas with each in equal quantities a totally different ROS&RNS composition can be obtained compared without the glass tube. It figures out that for small molecular admixtures the reactive species composition is nitrogen dominated and for higher admixtures it is oxygen dominated. Consequently, by shielding the ambient air from the active effluent and by admixing molecular oxygen and nitrogen the ROS&RNS composition can be designed.
The current work is focused on the study of two surface modification plasma processes, (i) the active screen plasma nitriding (ASPN) and nitrocarburizing (ASPNC) for the hardening of ferrous surfaces and (ii) the microwave plasma assisted chemical vapor deposition (MW-PACVD) for the synthesis of single crystal and doped diamond. Conventional and active screen plasma nitriding processes have been investigated in a cylindrical, industrial scale ASPN reactor with a volume of about 1 m3, using low-pressure pulsed dc H2-N2 plasmas with admixtures of CH4 or CO2. The experiments were carried out (i) with the plasma at an internal model probe, (ii) with the plasma at the active screen (floated model probe) and (iii) with the plasma at the active screen and an additional plasma at the biased model probe. For deeper insights in ASPN and ASPNC processes, a laboratory scale plasma nitriding monitoring reactor, PLANIMOR, has been constructed. The main feature of this reactor is the linear configuration of the electrode setup combined with a tubular glass vessel, overcoming the experimental disadvantages of cylindrical laboratory scale ASPN reactors. With the help of infrared laser absorption spectroscopy (IRLAS) the rotational temperature of the stable molecules in the gas phase and the concentrations of the precursor, CH4, and the reaction products (NH3, HCN, C2H2, C2H4, CO, CH3) could be determined in both reactors, depending on the plasma power, the gas mixture, the plasma at the model probe and the admixture of CH4. Furthermore, the admixture of CO2 as the carbon containing precursor has been studied in the ASPN reactor leading to an additional reaction product H2O. The concentration of the molecular species has been found being in a range of 1012 to 1016 molecules cm-3. Also optical emission spectroscopy (OES) has been applied during the studies for analyzing the emission of the plasmas in the nitriding and nitrocarburizing processes. A similar behavior of the plasma chemistry in PLANIMOR comparing to that in the ASPN reactor has been found. Beside the plasma chemical investigations, both reactors have been used for the treatment of C15 steel samples. These samples have been analyzed with the help of GDOES resulting in the elements profile of the treated surfaces. It has been found that samples treated in PLANIMOR reach comparable nitriding results as samples treated in the ASPN reactor. Another focus of interest during the investigations about plasma nitrocarburizing has been the application of a carbon containing screen electrode as carbon source. For this purpose the carbon containing precursor and the steel screen have been substituted by a meshed carbon electrode, acting as the active screen. This change of the setup leads to a decrease of the NH3 production by a factor of 2.5 and an increase of the concentrations of HCN by a factor of 30 and of C2H2 by a factor of 70. The investigations of MW-PACVD processes used for diamond layer deposition have been carried out in a jacketed stainless steel reactor (JR), dedicated to the deposition of single crystalline diamond under high pressure and plasma power conditions. Using H2-plasmas with admixtures of CH4 and B2H6, the experiments were carried out in order to analyze the dependence of the plasma chemistry on several parameters, such as plasma power, pressure and gas mixture, in a wide pressure (p = 25…270 mbar) and power range (P = 0.6…4 kW). Using IRLAS the concentrations of six molecular species (B2H6, CH4, C2H2, C2H4, C2H6, CH3) have been monitored. With the help of OES the concentration of atomic boron could be determined. The concentrations of the detected molecular and atomic species were found to be in a range of 1010 to 1017 cm-3. With the help of the line-ratio-method the rotational temperature of the stable molecules has been determined. The temperature increased with pressure and power from 340 to 425 K. Using the Doppler broadening of the absorption line of CH3 at ν = 612,413 cm-1, the gas temperature has found to be Tg = (2000 ± 200) K under lower pressure and power conditions. For the H2-CH4 gas mixture, the experimental obtained molecular densities have been compared to those of a 1D-radial thermochemical model. The calculated radial densities have been integrated axially. For the same range the chemical processes in JR have been compared with those in a bell-jar (BJ) reactor. The hydrocarbon chemistry in JR has found to be similar to that in a BJ reactor.
The collisionless tearing mode is investigated by means of the delta-f PIC code EUTERPE solving the gyrokinetic equation. In this thesis the first simulations of electromagnetic non-ideal MHD modes in a slab geometry with EUTERPE are presented. Linear simulations are carried out in the cases of vanishing and finite temperature gradients. Both cases are benchmarked using a shooting method showing that EUTERPE simulates the linearly unstable tearing mode to a very high accuracy. In the case of finite diamagnetic effects and values of the linear stability parameter Delta of order unity analytic predictions of the linear dispersion relation are compared with simulation results. The comparison validates the analytic results in this parameter range. Nonlinear single-mode simulations are performed in the small- to medium-Delta range measuring the dependency of the saturated island half width on the equilibrium current width. The results are compared with an analytic prediction obtained with a kinetic electromagnetic model. In this thesis the first simulation results in the regime of fast nonlinear reconnection~(medium- to high-Delta range) are presented using the standard gyrokinetic equation. In this regime a nonlinear critical threshold has been found dividing the saturated mode from the super-exponential phase for medium-Delta values. This critical threshold has been proven to occur in two slab equilibria frequently used for reconnection scenarios. Either changing the width of the equilibrium current or the wave number of the most unstable mode makes the threshold apparent. Extensive parameter studies including the variation of the domain extensions as well as the equilibrium current width are dedicated to a comprehensive overview of the critical threshold in a wide range of parameters. Additionally, a second critical threshold for high-Delta equilibria has been observed. A detailed comparison between a compressible gyrofluid code and EUTERPE is carried out. The two models are compared with each other in the linear regime by measuring growth rates over wave numbers of the most unstable mode for two setups of parameters. Analytical scaling predictions of the dispersion relation relevant to the low-Delta regime are discussed. Employing nonlinear simulations of both codes the saturated island half width and oscillation frequency of the magnetic islands are compared in the small-Delta range. Both models agree very well in the limit of marginal instability and differ slightly with decreasing wave vector. Recently, the full polarisation response in the quasi-neutrality equation was implemented in EUTERPE using the Padé approximation of the full gyrokinetic polarisation term. Linear simulation results including finite ratios of ion to electron temperature are benchmarked with the dispersion relation obtained from a hybrid model. Finite temperature effects influence the saturated island width slightly with increasing ion to electron temperature ratio which has been verified by both models.
Im ersten Teil der Arbeit wird der erfolgreiche Aufbau einer Diagnostik zur quantitativen Bestimmung von Oberflächenladungsdichten beschrieben. Das Messprinzip bedient sich des elektro-optischen Pockelseffekts eines BSO-Kristalls, der in der Entladungszelle als Dielektrikum eingesetzt ist. Diese Methode arbeitet zeitlich und lateral aufgelöst, was die Untersuchung der Dynamik von Oberflächenladungen auf drei verschiedenen Zeitskalen ermöglicht. Die erste Zeitskala liegt in der Größenordnung von einigen 100 ns. Damit kann erstmals die Deposition von elektrischer Ladung auf einer dielektrischen Oberfläche während eines Entladungsdurchbruchs beobachtet werden. Die Deposition beginnt im Zentrum eines zuvor deponierten Ladungsspots. Die Polarität der neudeponierten Ladung ist der des ursprünglichen Ladungsspots entgegengesetzt. Die Folge ist, dass die absolute Ladungsdichte im Zentrum im Verlauf einiger hundert Nanosekunden kleiner wird als in den Randbereichen. Der Umladungsprozess wird so lange fortgesetzt, bis das elektrische Feld der neu deponierten Ladungen dem äußeren Feld so stark entgegenwirkt, dass die Spannung zur Aufrechterhaltung der Entladung unterschritten wird und die Entladung erlischt. Die zweite untersuchte Zeitskala liegt in der Größenordnung der Periodendauer der externen Spannung. Im Nulldurchgang der Spannung liegen zeitlich stationäre Ladungsdichteverteilungen auf dem Dielektrikum vor. Die Geometrie eines mittleren Ladungsspots wird in Abhängigkeit der anliegenden Spannungen und des Gasdrucks untersucht. Einerseits ist der Spotradius abhängig von den Ionisationsprozessen im Volumen, weil die Dichte der Raumladungen die Stärke des Elektronenfokus in das Innere der Entladung steuert. Andererseits wird die Spotbildung durch eine laterale Drift von Ladungsträgern kurz vor der Oberfläche aufgrund des elektrischen Feldes deponierter Ladungsträger beeinflusst. Die dritte untersuchte Zeitskala liegt in einer Größenordnung von Sekunden. Im Fall einer initial homogenen Oberflächenladungsverteilung nimmt die mittlere Ladungsdichte in einer Größenordnung von Sekunden monoton ab. Dieser Prozess stellt einen Ladungsabbau dar, dessen zeitliches Verhalten durch zwei überlagerte Exponentialfunktionen beschreiben ließ. Dadurch werden zwei Ladungsträgerpopulationen im BSO angenommen, die verschieden abgebaut werden. Im Fall einer initial inhomogenen Ladungsdichteverteilung wird ein Transport elektrischer Ladung auf der BSO-Oberfläche in einer Größenordnung von Sekunden beobachtet. Es wird weiterhin erstmals die durch einen Atmosphärendruck-Plasmajet deponierten Ladungen auf BSO zeitaufgelöst gemessen. Die zeitliche Entwicklung der Oberflächenladungen kann mit der Messung des elektrischen Stroms an einer der Ringelektroden des Jets korreliert werden. Dadurch wird geschlossen, dass der Ladungsaustauch nicht direkt durch einen Bullet verursacht wird. Er erzeugt stattdessen einen elektrisch leitfähigen Kanal zwischen der Düse des Jets zur BSO-Oberfläche. Infolgedessen kann Ladung, die sich auf der Innenseite der Jetkapillare befindet, auf den BSO-Kristall transportiert werden. Im zweiten Teil der Arbeit werden Kenngrößen entwickelt, die den Ordnungszustand einer aus Einzelobjekten zusammengesetzten Entladungsstruktur quantitativ beschreiben. Die Kenngrößen werten dabei die laterale Leuchtdichteverteilung der Entladungsemisssion, u.a. auf Basis der Tripel-Korrelationsfunktion. Dabei werden zwei separate Bifurkationsspannungen zwischen einer hexagonalen und einer ungeordneten Anordnung beobachtet: Bei der Verringerung der Spannung wird zunächst der Bifurkationspunkt der azimutalen Ordnung durchlaufen und anschließend der Bifurkationspunkt der radialen Ordnung. Die Systeme gehen jeweils in einen Zustand geringerer Ordnung über. Die Ursache des Ordnungsverlusts ist das zunehmende Fehlen von Entladungsspots, was im Mittel zu einer geringeren Wechselwirkung der Spots untereinander führt und das System an Freiheitsgraden gewinnt. Im dritten Teil dieser Arbeit wird erstmals ein Ansatz verfolgt, der die Steuerung lateral strukturierter Entladungen ermöglicht. Dafür wurde ein Aufbau konstruiert, bei dem ein gekühlter Halbleiter als Dielektrikum in der Entladungszelle dient. Dessen externe Beleuchtung führt bei einer anliegenden Spannung zu einer Änderung des Spannungsteilerverhältnisses der kapazitiven Elemente und schließlich zu einer lokalen Erhöhung der Spannung über dem Entladungsraum. Die Größe und Leuchtintensität der durch die Beleuchtung gezündeten Entladung ist stark abhängig von der beleuchteten Fläche, der Leistungsdichte der Beleuchtung und der anliegenden Spannung.