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The electron and negative ion densities in an asymmetric capacitively coupled low-pressure RF plasma in oxygen were systematically studied and compared to the electropositive argon RF plasma during continuous and pulsed power input. This work presents the careful design and realization of a non-invasive 160.28 GHz Gaussian beam microwave interferometry (MWI) as an innovative diagnostic tool. MWI directly provides the line integrated electron density without any model assumption. The high microwave frequency enables one to accurately describe the microwave free space propagation by means of Gaussian beam theory. The microwave interferometer is simultaneously coupled with laser photodetachment to experimentally determine the negative ion density in the CCRF oxygen discharge. This is the first time that both diagnostics were combined in low-pressure capacitively coupled RF oxygen plasmas. This thesis first presents comprehensive measurements of the steady state line integrated electron density in dependence on RF power and pressure for an argon and oxygen plasma. For both gases the electron density increases with RF power. However, the line integrated electron density in oxygen is about a factor 3 to 10 smaller than in argon. The reduced electron density is accompanied by a high number of negative ions, which exceeded the electron density and resulted in a high electronegative mode. With increasing RF power, the plasma switches into a low electronegative mode. Consequently, the discharge operates in two different modes, which are distinguished by their degree of electronegativity. The transition between the high and low electronegative modes is step-like and it was concluded that one can here directly see the discharge switches from the &alpha-mode to the &gamma-mode. The &gamma-mode (low electronegative mode, high RF power) is characterized by a strong increase of the electron density and a simultaneous decrease of the negative ion density. The increase may be connected to the production of secondary electrons by collision detachment of negative ions within the RF sheath (“pseudo-secondary electron”), in addition to the classical &gamma process due to positive ion bombardment of the powered electrode. In comparison to the &gamma-mode the &alpha-mode (high electronegative mode, low RF power) reveals more negative ions than electrons. Furthermore, a simple 0d attachment-detachment model was applied to calculate the effective rate coefficients for dissociative electron attachment and collisional detachment from the experimentally determined values of steady state electron and negative ion density, as well as the detachment decay time constant. Hence, the attachment rate coefficient of the molecular ground and the excited metastable state in dependence on RF power were determined. Moreover, the density of metastable molecular oxygen was estimated to 10% of the molecular ground state oxygen. The influence of each electronegative mode to the entire temporal behavior of the oxygen discharge was intensively investigated by pulsing the discharge. Here it was shown that for the low electronegative mode the afterglow behavior is similar to that of an electropositive argon plasma. In the high electronegative mode an electron density peak in the early afterglow was observed. It was concluded that the electron production originates from the collisional detachment of negative ions. The negative ion loss and the electron production in the early afterglow were modeled numerically with a 0d rate equation system. The model accurately describes the afterglow behavior of both electronegative modes and the additional electron density peak in the early of the high electronegative mode. For the high electronegative mode the molecular oxygen plays an important role as a detachment partner for the production of electrons in the early afterglow. Furthermore, the presence of the negative ions causes fluctuations of plasma parameters. 2d spatial and temporal fluctuations of the ion saturation current are measured during the instability. The temporal and phase resolved optical emission spectroscopy shows a strong change in emission pattern during the instability, which becomes more obvious for one RF cycle at characteristic instability phases. Here, the excitation patterns reveal significant changes in the electron heating mechanisms.
Abstract
In this series of two papers, the E-H transition in a planar inductively coupled radio frequency discharge (13.56 MHz) in pure oxygen is studied using comprehensive plasma diagnostic methods. The electron density serves as the main plasma parameter to distinguish between the operation modes. The (effective) electron temperature, which is calculated from the electron energy distribution function and the difference between the floating and plasma potential, halves during the E-H transition. Furthermore, the pressure dependency of the RF sheath extension in the E-mode implies a collisional RF sheath for the considered total gas pressures. The gas temperature increases with the electron density during the E-H transition and doubles in the H-mode compared to the E-mode, whereas the molecular ground state density halves at the given total gas pressure. Moreover, the singlet molecular metastable density reaches 2% in the E-mode and 4% in the H-mode of the molecular ground state density. These measured plasma parameters can be used as input parameters for global rate equation calculations to analyze several elementary processes. Here, the ionization rate for the molecular oxygen ions is exemplarily determined and reveals, together with the optical excitation rate patterns, a change in electronegativity during the mode transition.
Abstract
In this series of two papers we present results about the E-H transition of an inductively coupled oxygen discharge driven at radio frequency (13.56 MHz) for different total gas pressures. The mode transition from the low density E-mode to the high density H-mode is studied using comprehensive plasma diagnostics. The measured electron density can be used to distinguish between the different operation modes. This paper focuses on the determination of the negative atomic ion density and the electronegativity by two experimental methods and global rate equation calculation. As a result, the electronegativity significantly decreases over two orders of magnitude from about 25 in the E-mode to about 0.1 in the H-mode. The temporal behavior of the electronegativity in pulsed ICP shows that the negative atomic ion density reaches a steady state after 10 ms. Negative atomic ions are mainly produced by the dissociative attachment with the molecular ground state. The ion–ion recombination with the positive molecular ions and the collisional detachment with the singlet molecular metastables contribute significantly to the loss of the negative atomic ions.