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Infrared laser absorption spectroscopy (IRLAS) employing both tuneable diode and quantum cascade lasers (TDLs, QCLs) has been applied with both high sensitivity and high time resolution to plasma diagnostics and trace gas measurements.
TDLAS combined with a conventional White type multiple pass cell was used to detect up to 13 constituent molecular species in low pressure Ar/H2/N2/O2 and Ar/CH4/N2/O2 microwave discharges, among them the main products such as H2O, NH3, NO and CO, HCN respectively. The hydroxyl radical has been measured in the mid infrared (MIR) spectral range in-situ in both plasmas yielding number densities of between 1011 ... 1012 cm-3. Strong indications of surface dominated formation of either NH3 or N2O and NO were found in the H2-N2-O2 system. In methane containing plasmas a transition between deposition and etching conditions and generally an incomplete oxidation of the precursor were observed.
The application of QCLs for IRLAS under low pressure conditions employing the most common tuning approaches has been investigated in detail. A new method of analysing absorption features quantitatively when the rapid passage effect is present is proposed. If power saturation is negligible, integrating the undisturbed half of the line profile yields accurate number densities without calibrating the system. By means of a time resolved analysis of individual chirped QCL pulses the main reasons for increased effective laser line widths could be identified. Apart from the well-known frequency down chirp non-linear absorption phenomena and bandwidth limitations of the detection system may significantly degrade the performance and accuracy of inter pulse spectrometers. The minimum analogue bandwidth of the entire system should normally not fall below 250 MHz.
QCLAS using pulsed lasers has been used for highly time resolved measurements in reactive plasmas for the first time enabling a time resolution down to about 100 ns to be achieved. A temperature increase of typically less than 50 K has been established for pulsed DC discharges containing Ar/N2 and traces of NO. The main NO production and depletion reactions have been identified from a comparison of model calculations and time resolved measurements in plasma pulses of up to 100 ms. Considerable NO struction is observed after 5 ... 10 ms due to the impact of N atoms.
Finally, thermoelectrically cooled pulsed and continuous wave (cw) QCLs have been employed for high finesse cavity absorption spectroscopy in the MIR. Cavity ring down spectroscopy (CRDS) has been performed with pulsed QCLs and was found to be limited by the intrinsic frequency chirp of the laser suppressing an efficient intensity build-up inside the cavity. Consequently the accuracy and advantage of an absolute internal absorption calibration is not achievable. A room temperature cw QCL was used in a complementary cavity enhanced absorption spectroscopy (CEAS) configuration which was equipped with different cavities of up to ~ 1.3 m length. This spectrometer yielded path lengths of up to 4 km and a noise equivalent absorption down to 4 x 10-8 cm-1Hz-1/2. The corresponding molecular concentration detection limit (e.g. for CH4, N2O and C2H2 at 1303 cm-1/7.66 μm) was generally below 1 x 1010 cm-3 for 1 s integration times and one order of magnitude less for 30 s integration times. The main limiting factor for achieving even higher sensitivity is the residual mode noise of the cavity. Employing a ~ 0.5 m long cavity the achieved sensitivity was good enough for the selective measurement of trace atmospheric constituents at 2.2 mbar.
(A paperback version is published by Logos under ISBN 978-3-8325-2345-9.)
In this work the mechanisms leading to the generation of the various reactive oxygen and nitrogen species (RONS) in a cold atmospheric plasma (CAP) jet and means to control their composition were studied. The investigated CAP jet kinpen is typically operated with Ar feed gas (pure or with molecular admixtures), driven at a frequency of approximately 1 MHz and features fast ionization waves or guided streamers, traveling at velocities of several km/s. The complex reaction networks were investigated by numerical and experimental techniques. Detailed experimental, analytical and computational investigations on the mass and heat transport in the plasma plume were performed: A novel analytical approach to diffusion in jet flows, the non-dispersive path mapping approximation (NDPM) was developed. The method for the first time allows for an estimation of the ambient species density in the near-field of jets that feature a non-homogeneous flow-field. The NDPM approximation was employed for the evaluation of laser induced fluorescence measurements on OH. Through combining measurements and NDPM approximation, this approach yielded an estimation for the ambient species density at the position of the guided streamers, not only in the laminar, but also in the (standard) turbulent operating regime. Accurate measurements of the temporally averaged ambient species density and temperature in the plasma plume were obtained by quantitative Schlieren measurements. The method yields temperature values with sub-Kelvin accuracy and, through combination with computational fluid dynamics (CFD) simulations, allowed for an estimation of the calorimetric power of the jet. In order to obtain a defined environment for the jet to operate in, a shielding gas device was designed in this work, which creates a gas curtain of defined composition around the plasma plume. The plasma dynamics on the ns timescale was investigated by phase resolved optical measurements. The effect of different shielding compositions ranging from pure N2 to pure O2 on guided streamer propagation was investigated. An electrostatic focusing mechanisms was discovered, which promotes the propagation of guided streamers along the channels formed by a noble gas in the plume of plasma jets operating in electronegative gases (such as air or O2). Two zero-dimensional (volume averaged) models were developed: First, the local processes in the guided streamer were modeled using an electron impact reaction kinetic model, which is closely correlated to densities of metastable argon (Ar*) obtained by laser atom absorption measurements. This first model shows that Ar* is the species which dominantly drives the plasma chemistry in the plasma plume. This is exploited in the second plug-flow reaction kinetics model, which is employed to investigate the formation of long-living RONS and uses an Ar* source term as sole energy input. The model uses the previous experimental data on mass and heat transport and temporal dynamics as input and is in turn verified by quantitative FTIR absorption measurements on O3, NO2, N2O, HNO3 and N2O5 in the far-field of the jet, where large absorption lengths can be achieved using a multi pass cell. For the evaluation of the zero-dimensional model, the time-of-flight of RONS from their generation to reaching the multi pass cell was determined using CFD simulations. The insight gained through this combined experimental-modeling approach on the reaction networks revealed relevant control parameters and enabled adjusting the plasma chemistry towards a desired RONS output. Through choosing appropriate feed-gas admixtures and shielding gas compositions, it is possible to generate an NOx-dominated plasma chemistry, although the jet usually produces a strongly O/O3-dominated chemistry. Understanding and controlling the plasma chemistry of cold atmospheric plasma sources for medical applications is not only essential for research, but is also the key for designing future plasma sources for specific medical applications that yield an optimum efficacy and avoid potential side effects of plasma treatment.
The active screen plasma nitrocarburizing (ASPNC) technology is a state-of-the-art plasma-assisted heat treatment for improving surface hardness and wear resistance of metallic workpieces based on thermochemical diffusion. In comparison to conventional plasma nitrocarburizing, the use of an active screen (AS) improves thermal homogeinity at the workload and reduces soot formation. Further it can serve as a chemical source for the plasma processes, e.g. by use of an AS made of carbon-fibre reinforced carbon. This compilation of studies investigates the plasma-chemical composition of industrial- and laboratory-scale ASPNC plasmas, predominantly using in-situ laser absorption spectroscopy with lead-salt tuneable diode lasers, external-cavity quantum cascade lasers, and a frequency comb. In this way the temperatures and concentrations of the dominant stable molecular species HCN, NH3, CH4, C2H2, and CO, as well as of less prevelant species, were recorded as functions of e.g. the pressure, the applied plasma power, the total feed gas flow and its composition. Additionally, the diagnostics were applied to a chemically similar plasma-assisted process for diamond deposition.
Resulting from this thesis are new insights into the practical application of an AS made of CFC, the plasma-chemistry involving hydrogen, nitrogen, and carbon, and the particular role of CO as an indicator for reactor contamination. The effect of the feed gas composition on the resulting nitrogen- and carbon-expanded austenite layers was proven by combination of in-situ laser absorption spectroscopy with post-treatment surface diagnostics. Furthermore this work marks the first use of frequency comb spectroscopy with sub-nominally resolved Michelson interferometry for investigation of a low-pressure molecular discharge. This way the rotational bands of multiple species were simultaneously measured, resulting in temperature information at a precision hitherto not reached in the field of nitrocarburizing plasmas.
In the framework of the current work has been the plasma initiated and surface catalysed species conversion studied in low pressure and atmospheric plasmas. The aim of the work is to improve the understanding of the internal processes in order to increase the energy efficiency as well as the selectivity of the reaction products of future plasma devices. Beside many technical applications of plasmas, air purification shows great potential. Over the last decades, plasma based pollution control has proofed its ability to remove harmful contaminants or annoying odours from an air stream. However, the energy efficiency and the selectivity of the products are a remaining challenge.
Motivated by these issues, a multi stage packed-bed reactor has been used to remove admixed ethylene and toluene from an air stream. It has been found that the maximum toluene destruction has been 60%, whereas ethylene has been nearly completely removed. The specific energy β has been between 120 and 1600 JL-1. Fourier Transform Infrared spectroscopy, FTIR spectroscopy, has been used to identify and quantify the species H2O, CO2, CO, O3, HNO3, HCN, CH2O, CH2O2, N2O and NO2. However, none of these experiments led to the detection of NO.
The embedment of packing material into a plasma volume leads to increased surface effects. In order to study them, the inner side of a tube reactor, made of Pyrex, served as the surface under study and has been exposed to a rf plasma for 1h. The surface effects of the plasma treatment have been investigated indirectly by studying the oxidation of NO into NO2. After the plasma exposure, the reactor has been evacuated and filled with a gas mixture of 1% NO in N2 / Ar. Both species have been measured using quantum cascade laser absorption spectroscopy, QCLAS. It has been found that, using oxygen containing plasmas, the NO concentration decreased whereas the NO2 concentration increased. Therefore, oxygen containing plasmas are able to deposit oxygen on the surface. The filling with NO leads to the oxidation via the Eley-Rideal mechanism. A simplified model calculation supports these assumptions.
For a more comfortable application of the QCLAS, a compact multi channel spectrometer has been developed, TRIPLE Q. It combines the high time resolution with the possibility to measure the concentration of at least three infrared active species simultaneously. Due to the high time resolution, a huge number of spectra have to be analysed. In order to calculate absolute number densities, an algorithm has been developed which automatically treats typical phenomena like pulse jitter, rapid passage effect or variations of the intensity of the laser pulses.
The gas temperature is an important parameter in plasma physics. Using the TRIPLE Q system, the gas temperature has been determined for pulsed dc plasmas. For this case, NO has been used as a probe gas. From the spectra, the temperature has been calculated using the line ratio method. The relative intensity of the absorption structures of NO at 1900.5cm-1 and 1900.08cm-1 depend on the temperature. Therefore, the ratio has been used to calculate the gas temperature with a time resolution in the μs range.
Vibrationally excited nitrogen can be an energy reservoir that plays an important role in plasma chemistry. In N2 / N2O plasmas, vibrationally excited N2 can undergo relaxation via a resonant vibration vibration coupling between vibrationally excited N2 and N2O. Due to such an efficient energy transfer, the method allows one to study the relaxation of vibrationally excited N2. Using this method, molecules, which are not infrared active, can be monitored. This approach has extended the field of scientific and commercial applications of the QCLAS.