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The thesis describes experimental results based on optical diagnostics of low- pressure discharges. The models, which are necessary for the interpretation of the experimental data, are developed and simulations are done. The contents can be categorized into the following topics: 1) the time-resolved tunable diode laser absorption spectroscopy of excited states of argon in pulsed magnetron discharge and modeling the plasma afterglow; 2) optical emission- and laser absorption spectroscopy of excited states of argon in radio-frequency (rf) discharge and calculation of the escape factor for self-absorption; 3) fast video recording of the oscillatory motion of a dust particle in rf discharge and analysis of the data.
Nano-size silver and copper clusters were produced with a DC magnetron-based gas aggregation source. The typical mass of the studied clusters was in the range of 10000 atoms for copper clusters, and in the range of 1000 atoms for silver clusters. The processes of cluster formation, cluster charging and cluster flow were investigated. Technique for measurement of cluster ion velocity distribution functions was developed and applied. Influence of the magnetron target erosion on the mass spectra was systematically investigated and quantitatively characterized. Results of the present work include an experimental and theoretical investigation of the effects, which are of great importance for the production of cluster beams with the desired properties.