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The thesis describes experimental results based on optical diagnostics of low- pressure discharges. The models, which are necessary for the interpretation of the experimental data, are developed and simulations are done. The contents can be categorized into the following topics: 1) the time-resolved tunable diode laser absorption spectroscopy of excited states of argon in pulsed magnetron discharge and modeling the plasma afterglow; 2) optical emission- and laser absorption spectroscopy of excited states of argon in radio-frequency (rf) discharge and calculation of the escape factor for self-absorption; 3) fast video recording of the oscillatory motion of a dust particle in rf discharge and analysis of the data.
Tunable diode laser absorption spectroscopy of argon metastable atoms in Ar/C2H2 dusty plasmas
(2009)
The tunable diode laser absorption spectroscopy method was used to measure Ar metastable density in order to study the dust growth process in hydrocarbon-containing plasmas. A simple model was proposed that successfully interprets the experimental results of pristine plasmas. The model is also suitable for explaining the influence of dust particle size on metastable density and for examining the dust growth process. The metastable density responded strictly to the formation of dust particles and their growth in processing plasmas. Using metastable density as an indicator is, therefore, a non-intrusive and effective method for the study of the dust growth process in hydrocarbon-containing plasmas.
Behavior of a porous particle in a radiofrequency plasma under pulsed argon ion beam bombardment
(2010)
The behavior of a single porous particle with a diameter of 250 μm levitating in a radiofrequency (RF) plasma under pulsed argon ion beam bombardment was investigated. The motion of the particle under the action of the ion beam was observed to be an oscillatory motion. The Fourier-analyzed motion is dominated by the excitation frequency of the pulsed ion beam and odd higher harmonics, which peak near the resonance frequency. The appearance of even harmonics is explained by a variation of the particles's charge depending on its position in the plasma sheath. The Fourier analysis also allows a discussion of neutral and ion forces. The particle's charge was derived and compared with theoretical estimates based on the orbital motion-limited (OML) model using also a numerical simulation of the RF discharge. The derived particle's charge is about 7–15 times larger than predicted by the theoretical models. This difference is attributed to the porous structure of the particle.