Refine
Document Type
- Article (1)
- Doctoral Thesis (1)
Has Fulltext
- yes (2)
Is part of the Bibliography
- no (2)
Keywords
- - (1)
- Beschichtung (1)
- HiPIMS (1)
- Magnetron (1)
- Nanoparticles (1)
- Nanopartikel (1)
- Plasmadiagnostik (1)
- Sputtering (1)
- Sputtern (1)
- copper nitride (1)
- crystal structure (1)
- magnetron sputtering (1)
- thin film deposition (1)
Institute
Publisher
- MDPI (1)