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Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N2 and Ar + O2 gas mixtures
- A hollow cathode discharge with a Ti cathode and a positively biased ring anode was operated in Ar + N2 or Ar + O2 gas mixtures. The energy distribution of plasma ions is investigated with the help of energy-resolved mass spectrometry. Singly and doubly charged Ar+ and Ar2+ ions and molecular N+2 or O+2 ions are the most abundant ionic species. The kinetic energy of all plasma ions is enhanced by a positive anode voltage.
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| Author: | Rainer HipplerORCiD, Martin Cada, Zdenek Hubicka |
|---|---|
| URN: | urn:nbn:de:gbv:9-opus-107387 |
| DOI: | https://doi.org/10.1140/epjd/s10053-022-00539-8 |
| ISSN: | 1434-6079 |
| Parent Title (English): | The European Physical Journal D |
| Publisher: | Springer Nature |
| Place of publication: | Berlin |
| Document Type: | Article |
| Language: | English |
| Date of first Publication: | 2022/11/09 |
| Release Date: | 2024/02/26 |
| Volume: | 76 |
| Issue: | 11 |
| Article Number: | 214 |
| Page Number: | 7 |
| Faculties: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |
| Collections: | weitere DFG-förderfähige Artikel |
| Licence (German): |  Creative Commons - Namensnennung 4.0 International |