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A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge
- AbstractThe performance of a positively biased external ring anode in combination with a hollow cathode (HC) discharge or a magnetron sputtering (MS) discharge, both with a Ti cathode and with Ar as working gas, is investigated. Plasma and floating potential increase as function of anode voltage. Energy-resolved mass spectrometry reveals that the kinetic energy of argon and titanium ions is enhanced by a positive anode voltage allowing for an effective energy control of plasma ions.
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| Author: | Rainer HipplerORCiD, Martin Cada, Zdenek Hubicka |
|---|---|
| URN: | urn:nbn:de:gbv:9-opus-59248 |
| DOI: | https://doi.org/10.1088/1361-6595/abe0cc |
| ISSN: | 0963-0252 |
| ISSN: | 1361-6595 |
| Parent Title (English): | Plasma Sources Science and Technology |
| Publisher: | IOP Publishing |
| Place of publication: | Bristol |
| Document Type: | Article |
| Language: | English |
| Date of first Publication: | 2021/04/08 |
| Release Date: | 2022/11/01 |
| Tag: | Langmuir probe diagnostics; energy-resolved ion mass spectrometry; hollow cathode discharge; magnetron sputtering discharge; positively biased anode |
| GND Keyword: | - |
| Volume: | 30 |
| Issue: | 4 |
| Article Number: | 045003 |
| Page Number: | 15 |
| Faculties: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |
| Licence (German): |  Creative Commons - Namensnennung |