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Time-resolved optical emission spectroscopy of a unipolar and a bipolar pulsed magnetron sputtering discharge in an argon/oxygen gas mixture with a cobalt target
- Abstract Reactive high power impulse magnetron sputtering (HiPIMS) of a cobalt cathode in pure argon gas and with different oxygen admixtures was investigated by time-resolved optical emission spectroscopy (OES) and time-integrated energy-resolved mass spectrometry. The HiPIMS discharge was operated with a bipolar pulsed power supply capable of providing a large negative voltage with a typical pulse width of 100 μs followed by a long positive pulse with a pulse width of about 350 μs. The HiPIMS plasma in pure argon is dominated by Co+ ions. With the addition of oxygen, O+ ions become the second most prominent positive ion species. OES reveals the presence of Ar I, Co I, O I, and Ar II emission lines. The transition from an Ar+ to a Co+ ion sputtering discharge is inferred from time-resolved OES. The enhanced intensity of excited Ar+* ions is explained by simultaneous excitation and ionisation induced by energetic secondary electrons from the cathode. The intensity of violet Ar I lines is drastically reduced during HiPIMS. Intensity of near-infrared Ar I lines resumes during the positive pulse indicating an additional heating mechanism.
Author: | Rainer HipplerORCiD, Martina Cada, Vitezslav Stranak, Zdenek Hubicka |
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URN: | urn:nbn:de:gbv:9-opus-59212 |
DOI: | https://doi.org/10.1088/1361-6595/ab54e8 |
ISSN: | 0963-0252 |
ISSN: | 1361-6595 |
Parent Title (English): | Plasma Sources Science and Technology |
Publisher: | IOP Publishing |
Document Type: | Article |
Language: | English |
Date of first Publication: | 2019/11/28 |
Release Date: | 2022/11/01 |
Tag: | HiPIMS; bipolar pulse; ion mass spectrometry; magnetron sputtering; time-resolved optical emission spectroscopy |
GND Keyword: | - |
Volume: | 28 |
Issue: | 11 |
Article Number: | 115020 |
Page Number: | 13 |
Faculties: | Mathematisch-Naturwissenschaftliche Fakultät / Institut für Physik |
Licence (German): | Creative Commons - Namensnennung |