Doctoral Thesis
Refine
Year of publication
- 2016 (2) (remove)
Document Type
- Doctoral Thesis (2) (remove)
Language
- English (2)
Has Fulltext
- yes (2)
Is part of the Bibliography
- no (2)
Keywords
- Plasmadiagnostik (2) (remove)
Institute
Comprehensive study of the discharge mode transition in inductively coupled radio frequency plasmas
(2016)
In this contribution, the mode transition of an inductively coupled radio frequency plasma at low pressure is investigated. Therefore, a comprehensive set of plasma diagnostics were applied to determine plasma and processing parameters. Therewith, the plasma kinetics and especially the important elementary processes were studied. Hence, the reason for the mode transition was identified.
This thesis is devoted to experiments on three-dimensional dust clouds which are confined in low temperature plasmas. Such ensembles of highly electrically charged micrometer-sized particles reveal fascinating physics, such as self-excited density waves and vortices. At the same time, these systems are challenging for experimental approaches due to their three-dimensional character. In this thesis, new optical diagnostics for dusty plasmas have been developed and, in combination with existing techniques, have been used to study these 3D dusty plasmas on different size and time scales.