Refine
Year of publication
- 2013 (1)
Document Type
- Doctoral Thesis (1)
Language
- English (1)
Has Fulltext
- yes (1)
Is part of the Bibliography
- no (1)
Keywords
- Oberflächenmodifizierung (1) (remove)
Institute
In this work, various aspects of fundamental physics and chemistry of molecular gas discharges are presented with emphasis on the interaction between species, activated by low-pressure plasmas, and surfaces. As already known, synergistic effects of multiple plasma-generated species are responsible for surface modification. However, due to the large number of internal parameters of a discharge and the complex plasma processes the identification of correlations between plasma characteristics and their effects on surfaces are complicated. Therefore, the aim of this thesis is to improve the understanding of several phenomena associated with plasma–surface interactions by measuring or calculating fundamental kinetic, transport or spectroscopic data needed to interpret measurements and hereby, to support some future applications of plasmas.