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The active screen plasma nitrocarburizing (ASPNC) technology is a state-of-the-art plasma-assisted heat treatment for improving surface hardness and wear resistance of metallic workpieces based on thermochemical diffusion. In comparison to conventional plasma nitrocarburizing, the use of an active screen (AS) improves thermal homogeinity at the workload and reduces soot formation. Further it can serve as a chemical source for the plasma processes, e.g. by use of an AS made of carbon-fibre reinforced carbon. This compilation of studies investigates the plasma-chemical composition of industrial- and laboratory-scale ASPNC plasmas, predominantly using in-situ laser absorption spectroscopy with lead-salt tuneable diode lasers, external-cavity quantum cascade lasers, and a frequency comb. In this way the temperatures and concentrations of the dominant stable molecular species HCN, NH3, CH4, C2H2, and CO, as well as of less prevelant species, were recorded as functions of e.g. the pressure, the applied plasma power, the total feed gas flow and its composition. Additionally, the diagnostics were applied to a chemically similar plasma-assisted process for diamond deposition.
Resulting from this thesis are new insights into the practical application of an AS made of CFC, the plasma-chemistry involving hydrogen, nitrogen, and carbon, and the particular role of CO as an indicator for reactor contamination. The effect of the feed gas composition on the resulting nitrogen- and carbon-expanded austenite layers was proven by combination of in-situ laser absorption spectroscopy with post-treatment surface diagnostics. Furthermore this work marks the first use of frequency comb spectroscopy with sub-nominally resolved Michelson interferometry for investigation of a low-pressure molecular discharge. This way the rotational bands of multiple species were simultaneously measured, resulting in temperature information at a precision hitherto not reached in the field of nitrocarburizing plasmas.