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Fluorocarbon containing capacitively coupled radio frequency (cc-rf) plasmas are widely used in technical applications and as model systems for fundamental investigations of complex plasmas. Absorption spectroscopy based on pulsed quantum cascade lasers (QCL) was applied in the mid-IR spectral range of 1269-1275 cm-1. Absolute densities of the precursor molecule CF4 and of the stable product C3F8 were measured with a time resolution of up to 1 ms in pulsed CF4/H2 asymmetrical cc-rf (13.56 MHz) discharges. For this purpose both the non-negligible temperature dependence of the absorption coefficients and the interference of the absorption features of CF4 and C3F8 had to be taken into account in the target spectral range. Therefore, at two different spectral positions composite absorption spectra were acquired under the same plasma conditions in order to discriminate between CF4 and C3F8 contributions. A total consumption of∼ 12 % was observed for CF4 during a 1 s plasma pulse, whereas C3F8 appeared to be produced mainly from amorphous fluorocarbon layers deposited at the reactor walls. A gas temperature increase by ∼ 100 K in the plasma pulse was estimated from the measurements. Additionally, not yet identified unresolved absorption (potentially from the excited CF4 molecule) was found during the àon-phase'.
Application of quantum cascade laser absorption spectroscopy to studies of fluorocarbon molecules
(2009)
The recent advent of quantum cascade lasers (QCLs) enables room-temperature mid-infrared spectrometer operation which is particularly favourable for industrial process monitoring and control, i.e. the detection of transient and stable molecular species. Conversely, fluorocarbon containing radio-frequency discharges are of special interest for plasma etching and deposition as well as for fundamental studies on gas phase and plasma surface reactions. The application of QCL absorption spectroscopy to such low pressure plasmas is typically hampered by non-linear effects connected with the pulsed mode of the lasers. Nevertheless, adequate calibration can eliminate such effects, especially in the case of complex spectra where single line parameters are not available. In order to facilitate measurements in fluorocarbon plasmas, studies on complex spectra of CF4 and C3F8 at 7.86 μm (1269 – 1275 cm-1) under low pressure conditions have been performed. The intra-pulse mode, i.e. pulses of up to 300 ns, was applied yielding highly resolved spectral scans of ∼ 1 cm-1 coverage. Effective absorption cross sections were determined and their temperature dependence was studied in the relevant range up to 400 K and found to be non-negligible.