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Abstract
In this series of two papers we present results about the E-H transition of an inductively coupled oxygen discharge driven at radio frequency (13.56 MHz) for different total gas pressures. The mode transition from the low density E-mode to the high density H-mode is studied using comprehensive plasma diagnostics. The measured electron density can be used to distinguish between the different operation modes. This paper focuses on the determination of the negative atomic ion density and the electronegativity by two experimental methods and global rate equation calculation. As a result, the electronegativity significantly decreases over two orders of magnitude from about 25 in the E-mode to about 0.1 in the H-mode. The temporal behavior of the electronegativity in pulsed ICP shows that the negative atomic ion density reaches a steady state after 10 ms. Negative atomic ions are mainly produced by the dissociative attachment with the molecular ground state. The ion–ion recombination with the positive molecular ions and the collisional detachment with the singlet molecular metastables contribute significantly to the loss of the negative atomic ions.
Abstract
The laser photodetachment experiment in a diffuse helium–oxygen barrier discharge is evaluated by a 1D fluid simulation. As in the experiment, the simulated discharge operates in helium with
400
ppm
oxygen admixture at
500
mbar
inside a discharge gap of
3
mm
. The laser photodetachment is included by the interaction of negative ions with a temporally and spatially dependent photon flux. The simulation with the usually applied set of reactions and rate coefficients provides a much lower negative ion density than needed to explain the impact on the discharge characteristics in the experiment. Further processes for an enhanced negative ion formation and their capabilities of reproducing the experimental results are discussed. These further processes are additional attachment processes in the volume and the negative ion formation at the negatively charged dielectric. Both approaches are able to reproduce the measured laser photodetachment effect partially, but the best agreement with the experimental results is achieved with the formation of negative ions at the negatively charged dielectric.